Fast deposition of diamond-like carbon films by radio frequency hollow cathode method

Pang, Xiaolu; Peng, Huanhua; Yang, Huisheng; Gao, Kewei; Wu, Xiaolei; Volinsky, Alex A.

doi:10.1016/j.tsf.2013.02.123

Cited by 16 publications

(4 citation statements)

References 24 publications

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“…Ohtsu et al [34] have used MH cathode discharges with small diameter (D = 5 mm) and depth (W = 15 mm) of holes to achieve the high-growth rate of amorphous hydrocarbon (a-C:H) thin films. In reference [35], the authors used the parallel plates form of an RF hollow cathode, with cathode-to-cathode distance equal to 45 mm for deposition of diamond like carbon (DLC) thin films. A hollow cathode with a diameter of 15.5 mm and a depth of 36 mm was used for the treatment of nanoparticles, plasma polymerization and nanocomposite fabrication [21].…”

Section: Introductionmentioning

confidence: 99%

Plasma parameters of RF capacitively coupled discharge: comparative study between a plane cathode and a large hole dimensions multi-hollow cathode

Djerourou

Djebli

Ouchabane

2019

Eur. Phys. J. Appl. Phys.

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This work deals with a comparative study of plasma discharge generated by two geometrical configurations of cathodes through an investigation of their plasma parameters. A large hole diameter and depth (D = 40 mm, W = 50 mm) multi-hollow (MH) cathode compared with a plane (PL) cathode are presented for argon capacitively coupled radiofrequency discharge. The electrical characteristics of MH and PL cathodes have been measured in terms of the self-bias voltage (Vdc) while the Langmuir probe was used to measure electron density (ne) and electron temperature (Te) for a wide range of gas pressure (60–400 mTorr) and incident power (50–300 W). It is found that the hollow cathode effect (HCE) is optimum at 60 mTorr with 220 mTorr as a critical gas pressure for which a transition from HCE to insufficient HCE is seen. The electron temperature varies from 3 to 5 eV in the case of MH and PL cathodes with respect to incident power and gas pressure.

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Section: Introductionmentioning

confidence: 99%

Plasma parameters of RF capacitively coupled discharge: comparative study between a plane cathode and a large hole dimensions multi-hollow cathode

Djerourou

Djebli

Ouchabane

2019

Eur. Phys. J. Appl. Phys.

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“…This effect is obtained when two parallel plates are cathodically polarized, so that an electron present between them is repeatedly repelled before leaving the inside 24 . Through the use of the active screen system, a better electrons confinement effect was obtained in comparison to the active screen partial system.…”

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confidence: 99%

DLC Films Grown On Steel Using An Innovator Active Screen System For PECVD Technique

et al. 2016

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In this work, an active screen plasma discharge system based technology was incorporated in a PECVD reactor for DLC films growth, making it a new development in DLC films deposition. In this case, the active screen system is used to seek better electrons confinement, which might result in high ions density due to the collisions number increase, leading to a possible increase in ionization. DLC films were grown on steel substrates, using two variations of this system. In order to enhance adhesion between coating and substrate, a silicon interlayer was deposited, using different bias voltages. Morphological and structural characterization was performed by scanning electron microscopy, optical profilometry and Raman scattering spectroscopy. Tribological tests were performed by nanohardness, scratch and wear tests. Results showed that the plasma confinement promoted good films adhesion, which may be related to a high sub-implantation. This might be a consequence of the pressure decrease, as well as, to the ions energy distribution narrowing.

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“…They found that 10 µm coating has more wear resistance. Pang, et al [20] deposited DLC lms on p-type Si (100) substrates using the RF hollow cathode method and obtained a deposition rate of 45 nm/min deposition rate. The higher deposition rate is obtained at higher plasma density.…”

Section: Introductionmentioning

confidence: 99%

Dry Drilling Performance Enhancement using Optimized Diamond-Like Carbon Coatings

Sefene

Jatti²,

Jatti³

et al. 2022

Preprint

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This study demonstrates the performance enhancement of drill bits during dry cutting operation of LM6 aluminum alloy and bright mild steel using optimized Diamond-Like-Carbon (DLC) coatings. DLC coatings are deposited using Plasma Enhanced Chemical Vapour Deposition (PECVD) process by varying the process parameters, bias voltage, bias frequency, gas mixture, and working pressure. DLC coatings were grown over the silicon, high-speed steel, and stainless-steel pin substrate. Coating’s chemical, composition, topography, and mechanical properties measurements were checked using Fourier Transform Infrared (FTIR), micro-Raman spectroscopy, Atomic Force Microscopy, and intrinsic stress & nano-hardness/micro-hardness tester, respectively. Coating deposition and optimization were carried out as per the Taguchi method. Further, the optimized DLC coatings tribological test and the effect of DLC coating on the tool life were performed. Results showed that the DLC-coated substrate had less wear loss and coefficient of friction than the uncoated substrate. The dry-cutting test showed that coated drill bits produce a better surface finish and consume less power in the drilling operation than uncoated drill bits. This is due to the low coefficient of friction and low wear loss of the DLC coatings.

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Fast deposition of diamond-like carbon films by radio frequency hollow cathode method

Cited by 16 publications

References 24 publications

Plasma parameters of RF capacitively coupled discharge: comparative study between a plane cathode and a large hole dimensions multi-hollow cathode

Plasma parameters of RF capacitively coupled discharge: comparative study between a plane cathode and a large hole dimensions multi-hollow cathode

DLC Films Grown On Steel Using An Innovator Active Screen System For PECVD Technique

Dry Drilling Performance Enhancement using Optimized Diamond-Like Carbon Coatings

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