Fast-axial-flow CO2-laser with integrated turbo-blower

Beck, R.

doi:10.1007/bf00693941

Cited by 5 publications

(1 citation statement)

References 3 publications

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“…These lasers exist commercially in two basic fla− vours, the fast−axial−flow (FAF) [60] and the fast−trans− verse−flow (FTF) configurations. The forced rapid flow of the laser gas allowed for an increased RF power input with− out an adverse overheating of the gas medium, resulting in higher output power levels as compared to their diffusion− −cooled counterpart but at an expense of additional system complexity (blowers, heat exchangers, etc.).…”

Section: Brief Overview Of Relevant Co 2 Laser Technologymentioning

confidence: 99%

CO2 laser drives extreme ultraviolet nano-lithography — second life of mature laser technology

Nowak

Ohta

Suganuma

et al. 2013

Opto-Electronics Review

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It was shown both theoretically and experimentally that nanosecond order laser pulses at 10.6 micron wavelength were superior for driving the Sn plasma extreme ultraviolet (EUV) source for nano-lithography for the reasons of higher conversion efficiency, lower production of debris and higher average power levels obtainable in CO2 media without serious problems of beam distortions and nonlinear effects occurring in competing solid-state lasers at high intensities. The renewed interest in such pulse format, wavelength, repetition rates in excess of 50 kHz and average power levels in excess of 18 kiloWatt has sparked new opportunities for a matured multi-kiloWatt CO2 laser technology. The power demand of EUV source could be only satisfied by a Master-Oscillator-Power-Amplifier system configuration, leading to a development of a new type of hybrid pulsed CO2 laser employing a whole spectrum of CO2 technology, such as fast flow systems and diffusion-cooled planar waveguide lasers, and relatively recent quantum cascade lasers. In this paper we review briefly the history of relevant pulsed CO2 laser technology and the requirements for multi-kiloWatt CO2 laser, intended for the laser-produced plasma EUV source, and present our recent advances, such as novel solid-state seeded master oscillator and efficient multi-pass amplifiers built on planar waveguide CO2 lasers.

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Section: Brief Overview Of Relevant Co 2 Laser Technologymentioning

confidence: 99%