2019
DOI: 10.1002/adfm.201907150
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Fast and Ultraclean Approach for Measuring the Transport Properties of Carbon Nanotubes

Abstract: In this work, a fast approach for the fabrication of hundreds of ultraclean field-effect transistors (FETs) is introduced, using single-walled carbon nanotubes (SWCNTs). The synthesis of the nanomaterial is performed by floating-catalyst chemical vapor deposition, which is employed to fabricate high-performance thin-film transistors. Combined with palladium metal bottom contacts, the transport properties of individual SWCNTs are directly unveiled. The resulting SWCNT-based FETs exhibit a mean fieldeffect mobil… Show more

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Cited by 9 publications
(7 citation statements)
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References 41 publications
(93 reference statements)
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“…Thermophoretic precipitator and the deposition process are described in Refs. [30,31] and the FC-CVD process in Refs. [30,32].…”
Section: Experimental Methodsmentioning
confidence: 99%
See 1 more Smart Citation
“…Thermophoretic precipitator and the deposition process are described in Refs. [30,31] and the FC-CVD process in Refs. [30,32].…”
Section: Experimental Methodsmentioning
confidence: 99%
“…In this paper we report a new scheme for fabrication of suspended ultra-clean SWCNT weak links. Our approach is based on the floating catalyst chemical vapour deposition (FC-CVD) growth of SWCNTs and direct deposition of pristine SWCNTs on prefabricated metallic electrodes at nearambient temperature [30,31]. To obtain good electrical contacts between these aerosol-synthesized SWCNTs and the electrodes, our devices are vacuum annealed at the last step of the fabrication process.…”
Section: Introductionmentioning
confidence: 99%
“…It was found that the I d -V ds has a linear characteristic at various V gs , which indicates that the contact of SWCNTs film with metal electrodes is an ohmic contact. Figure 4e presents the transfer curves of our fabricated TFTs at drain-source bias voltage V ds = -0.05 V and gate-source sweeping voltage V gs from -10 V to +10 V. Here, the common parallel plate model was used to extract the mobility (shown in Supplementary text 3), [18,38,45] although this method would overestimate the capacitance of the SWCNTs film and thus underestimate the value of the extracted carrier mobility. Figure 4f and Supplementary table 1 show the mobility and the I on /I off ratio of 20 SWCNTs TFTs (L ch = 100 μm), together with those of other TFTs based on CNTs film.…”
Section: Resultsmentioning
confidence: 99%
“…The CNTs were synthesized in the gas phase with the floating catalyst chemical vapour deposition growth method (FC-CVD) followed by the direct thermophoretic deposition onto prefabricated chips 39 . A suspended nanotube can be viewed as a doubly clamped string with the fundamental oscillation frequency where the spring constant k is determined by the line tension of the tube, controlled by the DC gate voltage.…”
Section: Methodsmentioning
confidence: 99%