2009
DOI: 10.1017/s1431927609090011
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Fast and Simple Specimen Preparation for TEM Studies of Oxide Films Deposited on Silicon Wafers

Abstract: We present a fast and simple method to prepare specimens for transmission electron microscopy studies of oxide thin films deposited on silicon substrates. The method consists of scratching the film surface using a pointed diamond tip, in a special manner. Small and thin fragments are then detached from the film and its substrate. Depending on the scratching direction, the fragments can be used for plan-view or cross-section imaging. High-resolution images can be also obtained from thin edges of the film fragme… Show more

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Cited by 23 publications
(7 citation statements)
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“…Furthermore, iTEM software (Radius 2.0 version, Emsis, Muenster, Germany) was used for imaging connected with MegaView III on the CM120ST microscope (Emsis, Muenster, Germany). Samples for TEM investigation were prepared using the scratch method [20] with a diamond knife and formvar-covered grids.…”
Section: Characterization Methodsmentioning
confidence: 99%
“…Furthermore, iTEM software (Radius 2.0 version, Emsis, Muenster, Germany) was used for imaging connected with MegaView III on the CM120ST microscope (Emsis, Muenster, Germany). Samples for TEM investigation were prepared using the scratch method [20] with a diamond knife and formvar-covered grids.…”
Section: Characterization Methodsmentioning
confidence: 99%
“…Thus, for nanoparticles, a dilution was carried out in alcohol, from which a drop was taken on the TEM grid, covered with formvar. For thin films, the quick method [3] was chosen. In this case there is a risk of defects in the film, but they can be avoided by means of selecting suitable area from the preview using TEM images.…”
Section: Methodsmentioning
confidence: 99%
“…Additionally, transmission electron microscopy (TEM) examinations were conducted using a CM 120 ST microscope (Philips N.V., Amsterdam, The Netherlands), which operated at 120 kV and had a point-to-point resolution of 0.24 nm. The samples for the TEM investigation were dispersed in ethylic alcohol and collected on 300 mesh coated grids [53,54].…”
Section: Methodsmentioning
confidence: 99%