Facile fabrication of functional 3D micro-nano architectures with focused ion beam implantation and selective chemical etching

Garg, Vivek; Mote, Rakesh G.; Fu, Jianzhong

doi:10.1016/j.apsusc.2020.146644

Cited by 24 publications

(13 citation statements)

References 40 publications

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“…(d) resonant sensor mounted on top of a covar-header [142]. Garg et al [146] proposed a fabrication approach for Si 3D micro and nano-structure for the precise control and selective etching of an ion implanted pattern via focused ion beam (FIB) technique. The developed technique shows dedicated approach for the fabrication of 3D micro and nano structures with high aspect ratio architecture such as nano-mesh, nanopyramids, and nano-wires.…”

Section: Etchingmentioning

confidence: 99%

Si-based MEMS resonant sensor: A review from microfabrication perspective

Verma

Mondal

Gupta

2021

Microelectronics Journal

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With the technological advancement in micro-electro-mechanical systems (MEMS), microfabrication processes along with digital electronics together have opened novel avenues to the development of small-scale smart sensing devices capable of improved sensitivity with a lower cost of fabrication and relatively small power consumption. This article aims to provide the overview of the recent work carried out on the fabrication methodologies adopted to develop silicon based resonant sensors. A detailed discussion has been carried out to understand critical steps involved in the fabrication of the silicon-based MEMS resonator. Some challenges starting from the materials selection to the final phase of obtaining a compact MEMS resonator device for its fabrication have also been explored critically.

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Section: Etchingmentioning

confidence: 99%

Si-based MEMS resonant sensor: A review from microfabrication perspective

Verma

Mondal

Gupta

2021

Microelectronics Journal

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“…The oscillation frequency measured is up to 35.2 kHz with a 30V DC voltage. Garg et al [146] proposed a fabrication approach for Si 3D micro and nano-structure for the precise control and selective etching of an ion implanted pattern via focused ion beam (FIB) technique. The developed technique shows dedicated approach for the fabrication of 3D micro and nano structures with high aspect ratio architecture such as nano-mesh, nanopyramids, and nano-wires.…”

Section: Etchingmentioning

confidence: 99%

“…Figure22: The schematic diagram of 3D micro-nanostructures with an ion beam via bulk Si structuration [146]. (Reprinted with permission from[146])…”

mentioning

confidence: 99%

Si-based MEMS Resonant Sensor: A Review from Microfabrication Perspective

Verma¹,

Gupta²

2021

Preprint

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With the technological advancement in micro-electro-mechanical systems (MEMS), microfabrication processes along with digital electronics together have opened novel avenues to the development of small-scale smart sensingdevices capable of improved sensitivity with a lower cost of fabrication and relatively small power consumption. This article aims to provide the overview of the recent work carried out on the fabrication methodologies adoptedto develop silicon based resonant sensors. A detailed discussion has been carried out to understand critical steps involved in the fabrication of the silicon-based MEMS resonator. Some challenges starting from the materialsselection to the ?final phase of obtaining a compact MEMS resonator device for its fabrication have also been explored critically.

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“…Chalcogenide (ChG) glass is an artificially synthesized material composed of chalcogens (S, Se, and Te), which has been broadly applied in infrared optical systems due to its wide transmission band, high nonlinearity, and low phonon energy properties. − The microstructure array on the ChG glass surface could achieve the characteristics of a large field of view, antireflection, and depolarization, which promote the development of miniaturization and integration of ChG glass devices and shows wide application prospects in aerospace, medical, and optical fields. − At present, several methods have been proposed for manufacturing microstructure arrays, such as ultraprecision diamond machining, etching, focused ion-beam machining, and laser processing. − Compared with these conventional methods, precision glass molding (PGM) has been recognized as one of the most promising processes for the mass manufacturing of ChG glass components with high-quality microstructure arrays. − …”

Section: Introductionmentioning

confidence: 99%

Study of Interfacial Adhesion and Re–Ir Alloy Coating in Chalcogenide Glass Molding

Zhu

Zhou

et al. 2023

Langmuir

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Precision glass molding (PGM) has become an efficacious technique to fabricate high-precision optics. Chalcogenide (ChG) glass is increasingly used in thermal imaging, night vision, etc., because of its excellent infrared optical properties. Nevertheless, glass−mold interfacial adhesion has emerged as a pivotal issue within the PGM process. The interfacial adhesion during PGM has the potential to significantly undermine the performance of molded optics and reduce the longevity of molds. It is important to investigate interfacial adhesion behaviors in the PGM. In this study, the interfacial adhesion mechanism between ChG glass and the nickel−phosphorus (Ni−P) mold is analyzed using the cylindrical compression test. The effect of ChG glass internal stress on physical adhesion is investigated by finite element method (FEM) simulation. The spherical preform is proven to be capable of reducing the stress concentration and preventing physical adhesion. More importantly, a rhenium−iridium (Re−Ir) alloy coating is deposited on the Ni−P mold surface by ion sputtering to prevent atomic diffusion and resolve the problem of chemical adhesion. Finally, ChG glass microstructures with high accuracy are fabricated using the spherical ChG glass preform and the Re−Ircoated Ni−P mold by PGM.

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Facile fabrication of functional 3D micro-nano architectures with focused ion beam implantation and selective chemical etching

Cited by 24 publications

References 40 publications

Si-based MEMS resonant sensor: A review from microfabrication perspective

Si-based MEMS resonant sensor: A review from microfabrication perspective

Si-based MEMS Resonant Sensor: A Review from Microfabrication Perspective

Study of Interfacial Adhesion and Re–Ir Alloy Coating in Chalcogenide Glass Molding

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