Facile Chemical Solution Deposition of High‐Mobility Epitaxial Germanium Films on Silicon

Zou, Guifu; Luo, Hongmei; Ronning, F.; Sun, Baoquan; McCleskey, T. Mark; Burrell, Anthony K.; Bauer, Elizabeth; Jia, Quanxi

doi:10.1002/ange.200905804

Cited by 4 publications

(7 citation statements)

References 35 publications

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“…As for the properties, glassy graphene exhibits good chemical and thermal inertness, much like glassy carbon, with conductivity and flexibility comparable to those of graphene. Benefiting from the aqueous solution's large-scale synthesis system, which we term polymer-assisted deposition (PAD) (21)(22)(23)(24), glassy graphene is derived from a molecular precursor coating, resulting in a homogeneous ultra-smooth surface (<0.7 nm) film. Using the heatcuring property of the precursor polymer, the glassy graphene-based circuits are fabricated afterward through infrared laser direct writing.…”

Section: Introductionmentioning

confidence: 99%

Ultra-smooth glassy graphene thin films for flexible transparent circuits

Dai

Qian

et al. 2016

Sci. Adv.

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Section: Introductionmentioning

confidence: 99%

Ultra-smooth glassy graphene thin films for flexible transparent circuits

Dai

Qian

et al. 2016

Sci. Adv.

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“…The unique solution preparation of PAD has greatly improved the stability of the solution. The majority of the functional materials have been prepared using the PAD technique, including oxides [16,[20][21][22][23][24][25][26], nitrides [27][28][29][30], carbides [31,32] and some metals such as Ge [33]. Specifically, deposition of the perovskite dielectric oxide thin films on both single crystal substrates and base metallic substrates has been demonstrated [23,34,35].…”

Section: Introductionmentioning

confidence: 99%

Polymer‐assisted deposition of perovskite dielectric oxide thin films

Lin

Gao

2018

IET Nanodielectrics

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Perovskite dielectric oxide thin films are tremendously important because of their promising applications in microelectronics and optic-electronic devices. Towards scalable applications of these materials, the development of wellcontrolled and cost-effective fabrication techniques is still under development. Here, recent progresses in the fabrication of perovskite dielectric oxide thin films by using a generic chemical solution deposition technique named polymer-assisted deposition (PAD) are reviewed. In this technique, metal ions are bonded to water-soluble polymers, forming stable and homogeneous precursor solutions of metallic ions surrounded by polymers which prevent hydrolysis of metal ions. Fabrication of the perovskite dielectric oxide thin films using the PAD technique, both on single crystal substrates and base metallic substrates, has been realised with good controllability. The qualities of the films are comparable with those of the ones prepared by physical-vapour deposition techniques.

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“…Development of alternative approaches involving low-cost and large-area deposition of such films has attracted great attention. Polymer-assisted deposition (PAD) is an aqueous chemical solution method for thin film growth, which has been successfully developed to prepare single element materials, metal oxides, and metal carbides films. , There are several advantages for growing high-quality films. First, the polymer binds the metal ions by electrostatic attraction, hydrogen bonding, covalent bonding, or a combination thereof, and form the metal complex; meanwhile, the high molecular polymer will remove the unwanted anions or cations by filtering.…”

Section: Introductionmentioning

confidence: 99%

“…Second, the precursor is environmentally friendly in aqueous systems. Third, the film prepared by PAD is dense, smooth, and uniform without visible cracks or voids . In comparison with PAD, the typical sol–gel process utilizes the hydrolysis of metal alkoxide to form sol–gel and then grow the final films.…”

Section: Introductionmentioning

confidence: 99%