Fabrication of woodpile structures by two-photon polymerization and investigation of their optical properties

Serbin, Jesper; Ovsianikov, Aleksandr; Chichkov, Boris N.

doi:10.1364/opex.12.005221

Cited by 288 publications

(140 citation statements)

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“…MPP was first developed by Strickler and Webb, [62] and has now been used to create a range of high-resolution 3D free-form structures, including microchannels, [63][64][65] cantilevers, [66][67][68] microgears, [69,70] sub-micrometer oscillators, [71] hydrophobic atomic force microscopy tips, [72] and PhCs. [59,67,[73][74][75][76][77][78][79][80][81] Briefly, MPP utilizes the nonlinear nature of the multiphoton excitation process to only excite dye molecules in a very small volume around the focal point, with dimensions on the order of the resolution limit. These excited dye molecules locally initiate a polymerization.…”

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confidence: 99%

Introducing Defects in 3D Photonic Crystals: State of the Art

2006

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Public Reporting burden for this collection of information is estimated to average 1 hour per response, including the time for reviewing instructions, searching existing data sources, gathering and maintaining the data needed, and completing and reviewing the collection of information. Send comment regarding this burden estimates or any other aspect of this collection of information, including suggestions for reducing this burden, to Washington Headquarters Services, Directorate for information Operations and Reports, 1215 Jefferson Davis Highway, Suite 1204, Arlington, VA 22202-4302, and to the Office of Management and Budget, Paperwork Reduction Project (0704-0188,) Washington, DC 20503. AGENCY USE ONLY ( Leave Blank)2. REPORT DATE Advanced Materials, 18, 2665-2678 (2006). 3D photonic crystals (PhCs) and photonic bandgap (PBG) materials have attracted considerable scientific and technological interest. In order to provide functionality to PhCs, the introduction of controlled defects is necessary; the importance of defects in PhCs is comparable to that of dopants in semiconductors. Over the past few years, significant advances have been achieved through a diverse set of fabrication techniques. While for some routes to 3D PhCs, such as conventional lithography, the incorporation of defects is relatively straightforward; other methods, for example, selfassembly of colloidal crystals (CCs) or holography, require new external methods for defect incorporation. In this review, we will cover the state of the art in the design and fabrication of defects within 3D PhCs. The figure displays a fluorescence laser scanning confocal microscopy image of a y-splitter defect formed through two-photon polymerization within a CC. SUBJECT TERMS 15. NUMBER OF PAGES 1416. PRICE CODE SECURITY CLASSIFICATION OR REPORT UNCLASSIFIED SECURITY CLASSIFICATION ON THIS PAGE UNCLASSIFIED SECURITY CLASSIFICATION OF ABSTRACT UNCLASSIFIED LIMITATION OF ABSTRACT UL IntroductionPhotonic crystals (PhCs) are materials that possess spatial periodicity in their dielectric constant on the order of the wavelength (k) of light. These materials can strongly modulate light [1] and, with sufficient dielectric contrast and an appropriate geometry, may exhibit a photonic bandgap (PBG). This concept was first proposed in 1975 by Bykov [2] but remained relatively unknown until the seminal work of Yablonovitch [3] and John. [4] In a rough analogy to semiconductors, which possess an electronic bandgap, a PBG material prohibits the existence of photons with energies in the PBG. PhCs are naturally classified by the dimensionality of their periodicity, and in order to rigorously prevent the propagation of PBG frequencies in all directions, a 3D PhC with an omnidirectional, or complete PBG (cPBG) is required. cPBG materials have been fabricated and well characterized for operation at microwave and radio frequencies, however, operation in the visible and IR requires the characteristic length scales of these structures to be scaled down by several orders of magnitude...

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Introducing Defects in 3D Photonic Crystals: State of the Art

2006

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“…Direct laser writing of three-dimensional patterns is carried out using a piezo-stage system or a galvano-scanner system using three-dimensional computeraided design data. Although photopolymers such as SCR-500 were used in early works of femtosecond laser lithography, various negative-tone (Kondo et al, 2005), positive-tone photoresists (Yu et al, 2003) and hybrid materials (Serbin et al, 2004) have been used for the microfabrication during the last several years.…”

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confidence: 99%

Femtosecond Laser Nonlinear Lithography

Nishiyama¹,

Hirata²

2010

Lithography

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“…[1][2][3][4][5][6] An attractive three-dimensional (3D) micro-and nanofabrication method using ultrafast laser pulses is the two-photon polymerization (2PP) technique of photosensitive materials. [7][8][9][10][11][12][13][14][15] In the 2PP process, femtosecond (fs) laser pulses initiate 2PP via two-photon absorption and subsequent polymerization in an extremely localized focal volume. This results in 3D micro-and nanoscale structures.…”

Section: Introductionmentioning

confidence: 99%

High-aspect 3D two-photon polymerization structuring with widened objective working range (WOW-2PP)

et al. 2013

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We developed a novel two-photon polymerization (2PP) configuration for fabrication of high-aspect three-dimensional (3D) structures, with an overall height larger than working distance of the microscope objective used for laser beam focusing into a photosensitive material. This method is based on a modified optical 2PP setup, where a microscope objective (1003 high N.A.), immersion oil and cover glass can be moved together into the photosensitive material, resulting in an effective higher and wider objective working range (WOW-2PP). The proposed technique enables the fabrication of high-aspect structures with sub-micrometer process resolution. 3D structures with a height of 7 mm are demonstrated, which could hardly be built with the conventional 2PP set-up due to refractive index mismatch and laser beam disturbances.

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Fabrication of woodpile structures by two-photon polymerization and investigation of their optical properties

Cited by 288 publications

References 11 publications

Introducing Defects in 3D Photonic Crystals: State of the Art

Introducing Defects in 3D Photonic Crystals: State of the Art

Femtosecond Laser Nonlinear Lithography

High-aspect 3D two-photon polymerization structuring with widened objective working range (WOW-2PP)

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