Fabrication of two-dimensional hard X-ray diffraction gratings

Rutishauser, Simon; Bednarzik, Martin; Zanette, Irène; Weitkamp, Timm; Börner, M.; Mohr, Jürgen; Dávid, Christian

doi:10.1016/j.mee.2012.08.025

Cited by 41 publications

(28 citation statements)

References 34 publications

(41 reference statements)

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“…The grating pattern was produced by electron-beam writing into a resist layer and then transferred into the 300 μm thick silicon substrate by reactive ion etching [20]. For the setup described, grid-to-detector distance D 7.29 cm, 21.87 cm, 36.45 cm, and so on.…”

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confidence: 99%

A sensitive x-ray phase contrast technique for rapid imaging using a single phase grid analyzer

et al. 2013

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Phase contrast x-ray imaging (PCXI) is a promising imaging modality, capable of sensitively differentiating soft tissue structures at high spatial resolution. However, high sensitivity often comes at the cost of a long exposure time or multiple exposures per image, limiting the imaging speed and possibly increasing the radiation dose. Here, we demonstrate a PCXI method that uses a single short exposure to sensitively capture sample phase information, permitting high speed x-ray movies and live animal imaging. The method illuminates a checkerboard phase grid to produce a fine grid-like intensity reference pattern at the detector, then spatially maps sample-induced distortions of this pattern to recover differential phase images of the sample. The use of a phase grid is an improvement on our previous absorption grid work in two ways. There is minimal loss in x-ray flux, permitting faster imaging, and, a very fine pattern is produced for homogenous high spatial resolution. We describe how this pattern permits retrieval of five images from a single exposure; the sample phase gradient images in the horizontal and vertical directions, a projected phase depth image, an edge-enhanced image, and a type of scattering image. Finally, we describe how the reconstruction technique can achieve subpixel distortion retrieval and study the behavior of the technique in regard to analysis technique, Talbot distance, and exposure time.

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confidence: 99%

A sensitive x-ray phase contrast technique for rapid imaging using a single phase grid analyzer

et al. 2013

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“…If the metallic glass material has already crystallized, the mask surface can still be treated with an Arion milling machine. Furthermore, by separation of the Si mold from the absorbing septa through an etching process or thinning the Si mold, as described in previous studies, 23,32 it would be possible to eliminate another source of extra absorption. …”

Section: Resultsmentioning

confidence: 99%

“…20 A number of techniques have been proposed to fabricate x-ray absorption gratings/masks as well as increase their performance, most of which were through the Lithography, Electroplating, and Molding (LIGA) process. [21][22][23][24] They have mainly attempted to increase the height to pitch ratio (aspect ratio) or field of view of gratings but realizing both goals at the same time has posed severe difficulties. [25][26][27][28][29] In fact, the smaller the pitch of these gratings, the more the fabrication process becomes difficult in electroforming since achieving a uniform and relatively defect-free pattern requires considerable time and cost.…”

Section: Introductionmentioning

confidence: 99%

Edge-illumination x-ray phase contrast imaging with Pt-based metallic glass masks

Saghamanesh

Aghamiri

Olivo

et al. 2017

Review of Scientific Instruments

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Edge-illumination x-ray phase contrast imaging (EI XPCI) is a non-interferometric phase-sensitive method where two absorption masks are employed. These masks are fabricated through a photolithography process followed by electroplating which is challenging in terms of yield as well as time-and cost-effectiveness. We report on the first implementation of EI XPCI with Pt-based metallic glass masks fabricated by an imprinting method. The new tested alloy exhibits good characteristics including high workability beside high x-ray attenuation. The fabrication process is easy and cheap, and can produce large-size masks for high x-ray energies within minutes. Imaging experiments show a good quality phase image, which confirms the potential of these masks to make the EI XPCI technique widely available and affordable. Published by AIP Publishing. [http://dx

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“…This is done by a procedure called phase stepping, where G 2 is usually scanned for one or more periods of the interference fringe and images are acquired at each step. This configuration allows to decouple the detector resolution from the grating pitch but relies on the fabrication of high aspect ratio metal structures (G 2 ) 14,18 and further reduces the flux and dose efficiency, which is crucial for medical applications due to the additional photon loss after the sample. Therefore, a technique based only on phase shifting elements is favourable.…”

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Dual phase grating interferometer for tunable dark-field sensitivity

Kagias

Wang

Jefimovs

et al. 2017

Applied Physics Letters

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Hard X-ray dark-field and phase contrast imaging using grating interferometry have shown great potential for medical and industrial applications. However, the wide spread applicability of the method is challenged by a number of technical related issues such as relatively low dose and flux efficiency due to the absorption grating, fabrication of high quality absorption gratings, slow data acquisition protocol and high mechanical stability requirements. In this paper, the authors propose an interferometric method for dark-field and differential phase contrast imaging based on phase shifting elements only with the purpose to improve the dose and flux efficiency and simplify the setup. The proposed interferometer consists of two identical phase gratings of small pitch (1.3 μm), which generate an interference fringe at the detector plane with a large enough pitch that can be resolved directly. In particular, the system exhibits flexible and tunable dark-field sensitivity which is advantageous to probe unresolvable micro-structure in the sample. Experiments on a micro focal tube validated the method and demonstrated the versatility and tunability of the system compared to conventional Talbot grating interferometer.

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Fabrication of two-dimensional hard X-ray diffraction gratings

Cited by 41 publications

References 34 publications

A sensitive x-ray phase contrast technique for rapid imaging using a single phase grid analyzer

A sensitive x-ray phase contrast technique for rapid imaging using a single phase grid analyzer

Edge-illumination x-ray phase contrast imaging with Pt-based metallic glass masks

Dual phase grating interferometer for tunable dark-field sensitivity

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