Fabrication of Tm-doped Ta2O5 thin films using a co-sputtering method

Miura, Kenichiro; Osawa, Takumi; Yokota, Yoshiyuki; Suzuki, Tetsuhito; Hanaizumi, Osamu

doi:10.1016/j.rinp.2014.08.011

Cited by 21 publications

(17 citation statements)

References 10 publications

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“…We also reported on red or orange PL from europium-doped Ta 2 O 5 (Ta 2 O 5 :Eu) thin films deposited using the same co-sputtering method [7]. We recently demonstrated near-infrared PL from thulium-doped Ta 2 O 5 (Ta 2 O 5 :Tm) thin films produced by co-sputtering [8].…”

Section: Introductionmentioning

confidence: 95%

“…We placed two, three, or four Y 2 O 3 pellets (Furuuchi Chemical Corporation, 99.9% purity, diameter 20 mm) on the Ta 2 O 5 disc. The Ta 2 O 5 disc and Y 2 O 3 pellets were co-sputtered by supplying RF power to the target [5][6][7][8]. The flow rate of Ar gas introduced into the vacuum chamber was 15 sccm, and the RF power supplied to the target was 200 W. Commercially fused-silica plates (1 mm thick) were used as substrates, and they were not heated during sputtering.…”

Section: Fabrication Of Ta 2 O 5 :Y 2 O 3 Thin Filmsmentioning

confidence: 99%

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Fabrication and evaluation of Ta2O5:Y2O3 co-sputtered thin films

et al. 2014

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a b s t r a c tCo-sputtered tantalum (V) oxide and yttrium (III) oxide (Ta 2 O 5 :Y 2 O 3 ) thin films were fabricated using radio-frequency magnetron sputtering for the first time, and their photoluminescence (PL) and X-ray diffraction properties were evaluated. Broad PL spectra from 380 to 800 nm were observed only from films annealed at 700°C. The maximum PL intensities were found around a wavelength of 500 nm regardless of the Y concentrations of the films, and the films annealed at 700°C were primarily amorphous phases. It seems that the broad PL spectra from the Ta 2 O 5 :Y 2 O 3 films originated from oxygen vacancies of Ta 2 O 5 and Y 2 O 3 particles that may be produced in Ta 2 O 5 by co-sputtering.

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Section: Introductionmentioning

confidence: 95%

Section: Fabrication Of Ta 2 O 5 :Y 2 O 3 Thin Filmsmentioning

confidence: 99%

Fabrication and evaluation of Ta2O5:Y2O3 co-sputtered thin films

et al. 2014

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“…Many studies on rare-earth-doped Ta 2 O 5 have been conducted because Ta 2 O 5 is a promising host material for new phosphors due to its lower phonon energy than other popular oxide materials such as SiO 2 [4]. Thus far, we have fabricated various rare-earth doped Ta 2 O 5 thin films using a simple co-sputtering method and obtained various photoluminescence (PL) properties from the films [5] [6] [7] [8] [9]. We reported on red or orange PL from europium (Eu)-doped Ta 2 O 5 (Ta 2 O 5 :Eu) thin films deposited using the same co-sputtering method [6].…”

Section: Introductionmentioning

confidence: 99%

Photoluminescence and X-Ray Diffraction Properties of Europium and Silver Co-Doped Tantalum-Oxide Thin Films Deposited by Co-Sputtering

Shimada¹,

Miura²,

Fujii³

et al. 2017

MSCE

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We fabricated europium and silver co-doped tantalum-oxide (Ta 2 O 5 :Eu, Ag) thin films using a simple co-sputtering method for the first time, and we evaluated their photoluminescence (PL) and X-ray diffraction (XRD) properties. We found that the most remarkable PL peak at a wavelength of 615 nm due to Eu 3+ can be enhanced by Ag doping, and the strongest PL peak can be obtained from a Ta 2 O 5 :Eu, Ag thin film after annealing at 1000˚C. Based on XRD measurements, we found that Ag 2 Ta 8 O 21 crystalline phases produced by Ag doping are very important and Eu 3 TaO 7 phases should be avoided in order to enhance the objective PL peak from our Ta 2 O 5 :Eu, Ag thin films.

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“…We have reported on various rare-earth (Er, Eu, Tm, Y, and Ce) doping into Ta 2 O 5 thin films using simply co-sputtering of rare-earth-oxide (Er 2 O 3 , Eu 2 O 3 , Tm 2 O 3 , Y 2 O 3 , and CeO 2 ) pellets and a Ta 2 O 5 disc [6][7][8][9][10][11]. Moreover, in our recent study, we fabricated Er, Eu, and Ce co-doped Ta 2 O 5 (Ta 2 O 5 :Er, Eu, Ce) thin films using the same co-sputtering method, and observed yellow PL from the films [11].…”

Section: Introductionmentioning

confidence: 99%

Fabrication and evaluation of green-light emitting Ta 2 O 5 :Er, Ce co-sputtered thin films

et al. 2015

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a b s t r a c tErbium and cerium co-doped tantalum-oxide (Ta 2 O 5 :Er, Ce) thin films were fabricated using radio-frequency co-sputtering of Ta 2 O 5 , Er 2 O 3 , and CeO 2 for the first time. Enhanced green-light emission due to Er 3+ that seems to be sensitized by Ce 3+ was observed from the film annealed at 900°C for 20 min. From XRD measurements of the films, the b-Ta 2 O 5 (orthorhombic), d-Ta 2 O 5 (hexagonal), and (2 0 1) Ta 2 O 5 phases seem to be very important for obtaining green PL from them. Such Ta 2 O 5 :Er, Ce co-sputtered films can be used as high-refractive-index materials of autocloned photonic crystals that can be applied to novel green-light-emitting devices, and they will also be used as multi-functional coating films that can work both as anti-reflection and down-conversion films for realizing high-efficiency silicon solar cells.

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Fabrication of Tm-doped Ta2O5 thin films using a co-sputtering method

Cited by 21 publications

References 10 publications

Fabrication and evaluation of Ta2O5:Y2O3 co-sputtered thin films

Fabrication and evaluation of Ta2O5:Y2O3 co-sputtered thin films

Photoluminescence and X-Ray Diffraction Properties of Europium and Silver Co-Doped Tantalum-Oxide Thin Films Deposited by Co-Sputtering

Fabrication and evaluation of green-light emitting Ta 2 O 5 :Er, Ce co-sputtered thin films

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