Fabrication and evaluation of Ta2O5:Y2O3 co-sputtered thin films

Abstract

a b s t r a c tCo-sputtered tantalum (V) oxide and yttrium (III) oxide (Ta 2 O 5 :Y 2 O 3 ) thin films were fabricated using radio-frequency magnetron sputtering for the first time, and their photoluminescence (PL) and X-ray diffraction properties were evaluated. Broad PL spectra from 380 to 800 nm were observed only from films annealed at 700°C. The maximum PL intensities were found around a wavelength of 500 nm regardless of the Y concentrations of the films, and the films annealed at 700°C were primarily amorphous phases. It seems that the broad PL spectra from the Ta 2 O 5 :Y 2 O 3 films originated from oxygen vacancies of Ta 2 O 5 and Y 2 O 3 particles that may be produced in Ta 2 O 5 by co-sputtering.

Fabrication of Erbium and Ytterbium Co-Doped Tantalum-Oxide Thin Films Using Radio-Frequency Co-Sputtering

“…A Ta 2 O 5 :Er, Yb thin film was prepared using our co-sputtering method reported in [5]- [13]. A Ta 2 O 5 disc (99.99% purity, diameter 100 mm), two Er 2 O 3 pellets (99.9% purity, diameter 21 mm), and two Yb 2 O 3 pellets (99.9% purity, diameter 21 mm) were used as co-sputtering targets.…”

Photoluminescence Properties of Yb and Ag Co-Doped Ta₂O₅ Thin Films

“…Many studies on rare-earth-doped tantalum pentoxide (Ta 2 O 5 ) have been conducted because Ta 2 O 5 is a promising host material for new phosphors due to its lower phonon energy (100 ~ 450 cm -1 ) than other popular oxide materials such as SiO 2 [1]. We prepared various rare-earth-doped light-emitting Ta 2 O 5 thin films using a simple co-sputtering method, and obtained various photoluminescence (PL) properties from the films [2][3][4][5][6]. In particular, an ytterbium-doped Ta 2 O 5 (Ta 2 O 5 :Yb) thin film [6] is of interest because its emission-peak wavelength is 980 nm (due to the 2 F 5/2  2 F 7/2 transition of Yb 3+ ), having high transmittability to a human body, and it seems to be applicable to a novel real-time X-ray dosimeter system [7].…”

Preparation of Light-Emitting Ytterbium-Doped Tantalum-Oxide Thin Films Using a Simple Co-Sputtering Method

“…In addition, many studies on rare-earth-doped Ta 2 O 5 have been conducted because Ta 2 O 5 is a potential host material for new phosphors due to its low phonon energy (100 -450 cm −1 ) compared with other oxide materials such as SiO 2 [7]. We have reported on various rare-earth (Er, Eu, Tm, and Y) doping into Ta [12]. Moreover, in our recent study, we fabricated Er, Eu, and Ce co-doped Ta 2 O 5 (Ta 2 O 5 : Er, Eu, Ce) thin films using the co-sputtering method, and observed yellow PL from the films.…”