Fabrication of Three-Dimensional MIS Nano-Capacitor Based on Nanoimprinted Single Crystal Silicon Nanowire Arrays

Fabrication of self-aligned multilevel nanostructures

“…2. In previous work [41], [42], it has been shown that the performance of nanoscale capacitors depends on the surface area. With the use of multilevel patterning and perfect alignment, solid circular cross-sections of these capacitors can be enhanced into hollow tubular cross-sections.…”