Fabrication of TaOxNy thin films by reactive ion beam-assisted ac double magnetron sputtering for optical applications

Bah, Souleymane Toubou; Ba, C.; D’Auteuil, Marc; Ashrit, P. V.; Sorelli, Luca; Vallée, Réal

doi:10.1016/j.tsf.2016.07.055

Cited by 7 publications

(1 citation statement)

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“…Tantalum is characterized by a good plasticity, high strength, wear resistance, weldability, corrosion resistance, infusibility, biocompatibility, and it is clearly visible in X-rays and magnetic resonance imaging [ 6 , 7 ]. In addition, due to its properties, tantalum is widely used not only in electronics [ 8 , 9 ], protective coatings [ 10 , 11 ], anti-corrosion coatings [ 12 , 13 ], optical coatings [ 14 , 15 , 16 , 17 ], chemical industry [ 18 ], but also in biomedicine [ 19 , 20 , 21 , 22 , 23 , 24 ] (orthopedics and dentistry [ 25 , 26 , 27 , 28 , 29 ], endovascular stents, and neurosurgical implants [ 30 ]). However, the use of tantalum is difficult due to its high density, manufacturing complexity, and the relatively high cost.…”

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confidence: 99%

Nanomechanical and Nanotribological Properties of Nanostructured Coatings of Tantalum and Its Compounds on Steel Substrates

et al. 2021

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The present paper addresses the problem of identification of microstructural, nanomechanical, and tribological properties of thin films of tantalum (Ta) and its compounds deposited on stainless steel substrates by direct current magnetron sputtering. The compositions of the obtained nanostructured films were determined by energy dispersive spectroscopy. Surface morphology was investigated using atomic force microscopy (AFM). The coatings were found to be homogeneous and have low roughness values (<10 nm). The values of microhardness and elastic modulus were obtained by means of nanoindentation. Elastic modulus values for all the coatings remained unchanged with different atomic percentage of tantalum in the films. The values of microhardness of the tantalum films were increased after incorporation of the oxygen and nitrogen atoms into the crystal lattice of the coatings. The coefficient of friction, CoF, was determined by the AFM method in the “sliding” and “plowing” modes. Deposition of the coatings on the substrates led to a decrease of CoF for the coating-substrate system compared to the substrates; thus, the final product utilizing such a coating will presumably have a longer service life. The tantalum nitride films were characterized by the smallest values of CoF and specific volumetric wear.

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