Fabrication of surface plasmon waveguides and integrated components on Cytop

Daviau, Richard; Khan, Asad; Lisicka-Skrzek, Ewa; Tait, R. Niall; Berini, Pierre

doi:10.1016/j.mee.2009.11.078

Cited by 27 publications

(28 citation statements)

References 38 publications

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“…Advantages of polymers include ease of fabrication and (potentially) low cost. Recent work has focused on developing metal stripe waveguides and structures on [16,17] or embedded in [18] Cytop. Cytop is an amorphous fluoropolymer with a refractive index that is close to that of water (n ∼ 1.334) [19], motivating interest in this material (and in Teflon [20], a similar polymer) for biosensor applications, particularly involving LRSPPs [18,[21][22][23][24].…”

Section: Introductionmentioning

confidence: 99%

Passive long-range surface plasmon-polariton devices in Cytop

2012

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Passive elements operating with long-range surface plasmon polaritons and constructed as Au stripes embedded in Cytop were investigated theoretically and experimentally at wavelengths near 1310 nm. The elements investigated consist of straight waveguides, S-bends, Y-junctions, couplers, and Mach-Zehnder interferometers. The measured performance of these devices is close to theoretical expectations, although uniformity issues were noted, likely because of fabrication imperfections. Cytop is a low-index polymer suitable for biosensing applications involving aqueous buffers. The elements demonstrated thus could form the basis of integrated biosensing devices operating with long-range surface plasmons.

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Section: Introductionmentioning

confidence: 99%

Passive long-range surface plasmon-polariton devices in Cytop

2012

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“…[16][17][18] The membranes for this structure are $2.5Â thinner than previous Cytop membrane devices, 16 making them significantly more fragile and thus requiring new process steps for their fabrication. [16][17][18] The membranes for this structure are $2.5Â thinner than previous Cytop membrane devices, 16 making them significantly more fragile and thus requiring new process steps for their fabrication.…”

Section: A General Process Considerationsmentioning

confidence: 99%

Fabrication of long-range surface plasmon hydrogen sensors on Cytop membranes integrating grating couplers

Fong¹,

Berini²,

Tait³

2015

Journal of Vacuum Science &Amp; Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phen

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Articles you may be interested inModeling of long range surface plasmon polariton cladded membrane waveguides with integrated grating couplers as hydrogen sensors Integrated sensor for ultra-thin layer sensing based on hybrid coupler with short-range surface plasmon polariton and dielectric waveguide Refractive index sensor based on hybrid coupler with short-range surface plasmon polariton and dielectric waveguide Appl. Phys. Lett. 100, 111108 (2012); 10.1063/1.3693408 Demonstration of long-range surface plasmon-polariton waveguide sensors with asymmetric double-electrode structures Appl. Phys. Lett. 97, 201105 (2010); 10.1063/1.3513283 Fabrication of surface plasmon waveguides and integrated components on ultrathin freestanding membranesThe fabrication process for a long-range surface plasmon polariton hydrogen sensor is presented. The device, referred to as the cladded membrane waveguide, features a 5 lm wide and 20 nm thick gold stripe embedded in a 160 nm free standing Cytop membrane. Broadside excitation and output are achieved with integrated grating couplers. Hydrogen sensitivity is provided by an overlaid 5 nm thick palladium patch, which acts as a transduction medium. The device is fabricated by integrating several process techniques including blind through-wafer alignment, optical photolithography, overlaid electron beam lithography, metal lift-off, and through-substrate silicon wet etching. Fabricated results are presented along with a detailed discussion. The devices are characterized optically via a cutback measurement with the measured waveguide attenuation being consistent with simulated values.

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“…27. One method of bypassing this issue is to overetch the trenches purposely, then deposit the Au layer deep inside the trench; 26 after the resists have been stripped, the exposed Cytop surface could then be etched until it is flush with the metal waveguides with the metal patterns acting as a mask for the Cytop underneath. This is a crucial step because millimeter-thick Cytop edge beads accumulate from multiple layers of spincoating.…”

Section: Fabricationmentioning

confidence: 99%

“…Several surface scans were performed with a KLA Tencor P-10 Stylus Profilometer-a typical result for a Cytop lower cladding bearing Au features in trenches is shown in Fig. 26,27 The large-scale nonuniformity is not expected to prevent bonding because the Cytop layers deform sufficiently during bonding and annealing to fill in the voids; Fig. Ignoring the trenches, the surface profile (topography) varies by $30 nm, which is rather good considering that it occurs over very large areas of the wafer.…”

Section: B Surface and Bond Qualitymentioning

confidence: 99%

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Surface plasmon waveguide devices with Tg-bonded Cytop claddings

Chiu

Lisicka-Skrzek

Tait

et al. 2011

Journal of Vacuum Science &Amp; Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phen

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Articles you may be interested inModeling of long range surface plasmon polariton cladded membrane waveguides with integrated grating couplers as hydrogen sensors A versatile liquid-core/liquid-twin-cladding waveguide micro flow cell fabricated by rapid prototyping Appl. Phys. Lett. 95, 163702 (2009); 10.1063/1.3249771 Long-range surface plasmon-polariton waveguides and devices in lithium niobateSurface plasmon waveguide devices were fabricated in symmetric Cytop claddings by bonding the claddings with Au waveguides and microfluidic channels at the interface. Au features were patterned and deposited on the bottom wafer and microfluidic channels were patterned and etched into the top wafer. Aligned wafer bonding and annealing were performed at temperatures slightly above the glass transition temperature (T g ) of Cytop. The bond strength is high, allowing dicing, ultrasonic cleaning, and polishing of facets. The bond is also of good hermiticity as assessed by fluid injection, and of reasonable optical quality as verified by measurements of long-range surface plasmon propagation at k ¼ 1310 and 1550 nm.

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Fabrication of surface plasmon waveguides and integrated components on Cytop

Cited by 27 publications

References 38 publications

Passive long-range surface plasmon-polariton devices in Cytop

Passive long-range surface plasmon-polariton devices in Cytop

Fabrication of long-range surface plasmon hydrogen sensors on Cytop membranes integrating grating couplers

Surface plasmon waveguide devices with Tg-bonded Cytop claddings

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