Fabrication of superconducting Nb3Sn film by Co-sputtering

Commissioning of a two-target DC cylindrical magnetron sputter coater for depositing Nb₃Sn film on Nb superconducting radiofrequency cavities

“…Methods used to fabricate Nb3Sn thin films include Sn vapor deposition [14][15][16][17], co-deposition of Nb and Sn by thermal evaporation [18], Nb dipping into Sn liquid followed by thermal diffusion [19], electrochemical synthesis [20,21], bronze routes [22,23], and magnetron sputtering [24][25][26][27][28][29][30][31]. The best RF results with Nb3Sn cavities have been achieved using vapor diffusion technique [13,15,32].…”

Deposition of Superconducting Nb3Sn Coatings Using Multiple Magnetron Sputtering Techniques

“…In this regard, the use of Nb 3 Sn coatings, which have almost double the magnetic superheating field of 400 mT and a higher superconducting critical temperature of 18.3 K, seems very promising [11][12][13][14][15][16]. To date, several different methods have been proposed and developed for Nb 3 Sn thin film deposition.…”

“…The microstructural and superconducting properties of Nb 3 Sn films fabricated by co-sputtering on Nb and sapphire substrates have also been studied recently [13]. The authors observed the changes in the crystallinity and superconducting properties of these films with respect to the substrate temperature during the deposition.…”