Commissioning of a two-target DC cylindrical magnetron sputter coater for depositing Nb₃Sn film on Nb superconducting radiofrequency cavities

Shakel, Md Sharifuzzaman; Sayeed, Md Nizam; Eremeev, Grigory V.; Valente-Feliciano, Anne-Marie; Pudasaini, Uttar; Elsayed-Ali, Hani E.

doi:10.1016/j.vacuum.2023.112563

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2023

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“…Considering the significant successes in the use of the magnetron sputtering method for the formation of niobium-based coatings, in the last few years, work has significantly intensified on the possibility of using magnetrons for the formation of Nb 3 Sn coatings [20][21][22][23][24][25]. Experiments on layer-by-layer deposition of niobium and tin on a silicon oxide substrate were carried out in the Bell laboratory [26].…”

Section: Introductionmentioning

confidence: 99%

Deposition of Superconducting Nb3Sn Coatings Using Multiple Magnetron Sputtering Techniques

Yurjev,

Savelev,

Yurjeva

et al. 2023

Metals

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This paper describes the elemental and phase composition, microstructure, and superconducting properties of Nb3Sn deposited by magnetron sputtering. The films were deposited on sapphire substrates using three different techniques: co-evaporation, layer-by-layer deposition of Nb and Sn, and sputtering of a stoichiometric Nb3Sn target. The influence of magnetron operation mode on the as-deposited film element composition is described. After high-temperature annealing at 700–900 °C, the results indicate the formation of superconductive films. The highest critical temperature of 16.9 K was obtained for the film deposited at a stoichiometric Nb3Sn target and annealed at a temperature of 800 °C for 12 h. These results could be used for superconducting radio-frequency applications.

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