Fabrication of spherical microlens array by combining lapping on silicon wafer and rapid surface molding

Liu, Xiaohua; Zhou, Tianfeng; Zhang, Lin; Zhou, Wenchen; Yu, Jianfeng; Lee, L James; Yi, Allen Y.

doi:10.1088/1361-6439/aab995

Cited by 16 publications

(6 citation statements)

References 32 publications

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“…To obtain a high-quality microlens with a highly accurate geometry and surface finish, the material selection of the lapping ball and the lapping time were carefully investigated. They fabricated a microcavity with a ∼10 nm surface roughness in 30 s, which improved both the processing efficiency and surface quality [177]. A 5 × 5 microlens array was fabricated on a Si wafer, as shown in figure 37.…”

Section: Ultra-precision Lappingmentioning

confidence: 99%

A review of the techniques for the mold manufacturing of micro/nanostructures for precision glass molding

Zhou

Wang

et al. 2021

Int. J. Extrem. Manuf.

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Micro/nanostructured components play an important role in micro-optics and optical engineering, tribology and surface engineering, and biological and biomedical engineering, among other fields. Precision glass molding technology is the most efficient method of manufacturing micro/nanostructured glass components, the premise of which is meld manufacturing with complementary micro/nanostructures. Numerous mold manufacturing methods have been developed to fabricate extremely small and high-quality micro/nanostructures to satisfy the demands of functional micro/nanostructured glass components for various applications. Moreover, the service performance of the mold should also be carefully considered. This paper reviews a variety of technologies for manufacturing micro/nanostructured molds. The authors begin with an introduction of the extreme requirements of mold materials. The following section provides a detailed survey of the existing micro/nanostructured mold manufacturing techniques and their corresponding mold materials, including nonmechanical and mechanical methods. This paper concludes with a detailed discussion of the authors recent research on nickel-phosphorus (Ni-P) mold manufacturing and its service performance.

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Section: Ultra-precision Lappingmentioning

confidence: 99%

A review of the techniques for the mold manufacturing of micro/nanostructures for precision glass molding

Zhou

Wang

et al. 2021

Int. J. Extrem. Manuf.

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“…As an important optical component in photonic systems, microlenses (MLs) have made it possible to build high-performance, miniaturized systems for a wide range of applications, such as imaging, sensing, and optical communication [57][58][59]. AM has been used to fabricate MLs and MLAs.…”

Section: Multiphoton Stereolithographymentioning

confidence: 99%

Additive manufacturing of precision optics at micro and nanoscale

Zolfaghari

Chen

2019

Int. J. Extrem. Manuf.

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This review focuses on recent developments in additive manufacturing (AM) of precision optical devices, particularly devices consisting of components with critical features at the micro-and nanoscale. These include, but are not limited to, microlenses, diffractive optical elements, and photonic devices. However, optical devices with large-size lenses and mirrors are not specifically included as this technology has not demonstrated feasibilities in that category. The review is roughly divided into two slightly separated topics, the first on meso-and microoptics and the second on optics with nanoscale features. Although AM of precision optics is still in its infancy with many unanswered questions, the references cited on this exciting topic demonstrate an enabling technology with almost unlimited possibilities. There are many high quality reviews of AM processes of non-optical components, hence they are not the focus of this review. The main purpose of this review is to start a conversion on optical fabrication based on information about 3D AM methods that has been made available to date, with an ultimate long-term goal of establishing new optical manufacturing methods that are low cost and highly precise with extreme flexibility.

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“…Precision glass molding is a high-e ciency and low-cost manufacturing process, which can easily cope with the manufacture of optical elements in macroscopic and micro/nano scale [10][11]. It is becoming a preferred alternative method for high volume production of plastic and glass optics.…”

Section: Introductionmentioning

confidence: 99%

Fabrication of large-scale infrared diffractive lens arrays on chalcogenide glass by means of step-and-repeat hot imprinting and non-isothermal glass molding

Yang

Chen

Zhou

et al. 2021

Int J Adv Manuf Technol

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In this study, a new cost-effective and high-precision process chain for the fabrication of large-scale diffractive lens arrays on chalcogenide glass is proposed. First, a positive diffractive lens array is fabricated on a PMMA master substrate by employing a step-and-repeat hot imprinting process. The direct hot imprinting can transfer the microstructures from a heated mold to the polymer substrate accurately. Repeating the hot imprinting process according to a predetermined path, the desired diffractive lens array is obtained. Unlike photolithography and electron-beam writing, which are expensive technologies with sophisticated process, the hot imprinting is an easier, cheaper and more eco-friendly method for fabricating diffractive features with continuous pro le. Afterwards a casting process is applied to create a PDMS mold with the negative features. The diffractive lens array with continuous pro le is successfully transferred from the master substrate to the PDMS elastomer, which is used as a mold for subsequent precision glass molding. Finally, the microstructures of PDMS mold are replicated to the chalcogenide glass by non-isothermal glass molding. In this process, the mold and workpiece are set at different temperatures. The PDMS mold at low temperature maintains enough rigidity, so as to press the features into the softened chalcogenide glass more easily, which is at relatively higher temperature, resulting in a positive high-delity diffractive lens array on the chalcogenide glass. Surface pro les and optical performance of the fabricated components are characterized quantitatively. Results showed that large-scale diffractive lens array with continuous pro le can be successfully fabricated on Chalcogenide glass by this proposed process chain with high quality and integrity.

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Fabrication of spherical microlens array by combining lapping on silicon wafer and rapid surface molding

Cited by 16 publications

References 32 publications

A review of the techniques for the mold manufacturing of micro/nanostructures for precision glass molding

A review of the techniques for the mold manufacturing of micro/nanostructures for precision glass molding

Additive manufacturing of precision optics at micro and nanoscale

Fabrication of large-scale infrared diffractive lens arrays on chalcogenide glass by means of step-and-repeat hot imprinting and non-isothermal glass molding

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