Fabrication of single-crystal Si cantilever array

Saya, Daisuke; Fukushima, Keiko; Toshiyoshi, Hiroshi; Hashiguchi, Gen; Fujita, Hiroyuki; Kawakatsu, Hideki

doi:10.1016/s0924-4247(01)00742-7

Cited by 47 publications

(29 citation statements)

References 16 publications

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“…Nowadays microfabricated tips, which is the subject of this section, or particles attached to the end of a cantilever, which will be discussed in Section 2.5, are used. Commercially available microfabricated tips are made from silicon nitride [38] or silicon [109][110][111][112][113]. Both materials are oxidized under ambient conditions.…”

Section: Modificationmentioning

confidence: 99%

Force measurements with the atomic force microscope: Technique, interpretation and applications

Butt

Cappella

Kappl

2005

Surface Science Reports

3,187

2,949

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Section: Modificationmentioning

confidence: 99%

Force measurements with the atomic force microscope: Technique, interpretation and applications

Butt

Cappella

Kappl

2005

Surface Science Reports

3,187

2,949

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“…Among the previous works that have reported on the fabrication of ultrathin cantilever beams, virtually all of them employ a SOI wafer as the starting material. 12,13 The fabrication method used in this study has the advantage of fabricating all-silicon structures without any oxide layer being present under the silicon anchor of the cantilever beam. This eliminates any mismatch in material properties between the silicon and silicon dioxide material that exists when using SOI as the starting material.…”

Section: A Cantilever Beam Fabrication and Mechanical Characterizationmentioning

confidence: 99%

Detection of bacterial cells and antibodies using surface micromachined thin silicon cantilever resonators

Gupta¹,

Akin²,

Bashir³

2004

Journal of Vacuum Science &Amp; Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena

118

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This article describes a surface micromachined cantilever beam-based resonator for biological sensing applications. The study used a novel microfabrication technique of merged epitaxial lateral overgrowth (MELO) and chemical mechanical polishing (CMP) to fabricate thin, low stress, single-crystal silicon cantilever beams. The vibration spectra of the cantilever beams, excited by thermal and ambient noise, was measured in air using a Dimension 3100 Series scanning probe microscope (SPM), and in certain cases, a Polytec MSV300 laser Doppler vibrometer. The sensors were used to detect the mass of Listeria innocua bacteria by applying increasing concentration of bacteria suspension on the same cantilever beams and measuring the resonant frequency changes in air. Cantilever beams were also used to detect the mass of proteins such as Bovine Serum Albumin (BSA) and antibodies for Listeria that were attached to the cantilever's surfaces by physical adsorption; following which they were used to capture and detect the mass of the bacterial cells on the functionalized cantilever beam surfaces'. The effects of critical point drying of the proteins were evaluated and the results indicate that the functionality of the antibodies was not reduced once rehydrated after critical point drying. The developed biosensor is capable of rapid and ultrasensitive detection of bacteria and promises significant potential for the enhancement of microbiological research and diagnostics.

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“…SPM arrays for data storage with a wide pitch (> ~100μm) have also been reported [4,5]. A two-dimensional Si SPM array with a narrow range ( 10 m) has been fabricated for its application to nanolithography [6]. In addition, AFM metal probe arrays [7], glass probe arrays [8], and diamond probe arrays [9] have all recently been developed.…”

Section: Introductionmentioning

confidence: 99%

Micromachined Si cantilever arrays for parallel AFM operation

2008

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Silicon cantilever arrays with a very small pitch for parallel AFM operations were studied. We fabricated 1x104 in eight groups and 1x30 Si probe arrays and produced a smaller pitch (15 m) between probe tips by using Si anisotropic etching with a vertical wall shaped oxide mask. The vertical controls of Si probes were able to operate individually or in a group by integrating electrostatic actuators into the cantilevers of the probes. The fabricated Si cantilever arrays showed reasonable dynamic characteristics for the probe cantilever and reliable parallel operation of AFM.

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Fabrication of single-crystal Si cantilever array

Cited by 47 publications

References 16 publications

Force measurements with the atomic force microscope: Technique, interpretation and applications

Force measurements with the atomic force microscope: Technique, interpretation and applications

Detection of bacterial cells and antibodies using surface micromachined thin silicon cantilever resonators

Micromachined Si cantilever arrays for parallel AFM operation

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