Fabrication of Silicone Grating Using a Photoimprinted Polymer Mold and Period Control by Mechanical Distortion

Abstract

We fabricated a tunable transmission grating by molding a silicone elastomer (polydimethylsiloxane), and evaluated its optical characteristics during a compression process. A glass plate with a photoimprinted polymer grating film was used as a mold. The grating period of the molded elastomer was measured as functions of the compressive stress. The grating period changed from 3.02 to 2.86 µm by compressing the elastomer in the direction perpendicular to the grooves.