2013
DOI: 10.1186/1556-276x-8-457
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Fabrication of Si heterojunction solar cells using P-doped Si nanocrystals embedded in SiN x films as emitters

Abstract: Si heterojunction solar cells were fabricated on p-type single-crystal Si (sc-Si) substrates using phosphorus-doped Si nanocrystals (Si-NCs) embedded in SiNx (Si-NCs/SiNx) films as emitters. The Si-NCs were formed by post-annealing of silicon-rich silicon nitride films deposited by electron cyclotron resonance chemical vapor deposition. We investigate the influence of the N/Si ratio in the Si-NCs/SiNx films on their electrical and optical properties, as well as the photovoltaic properties of the fabricated het… Show more

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Cited by 20 publications
(3 citation statements)
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“…They obtained the Si NCs/SiC multilayers after high temperature annealing. The PCE of the solar cells reached 4.66% and the IQE at 400 nm was 35% which is higher than traditional c-Si cells [76] . Wu et al fabricated the P doped Si rich SiN films by ECR-CVD and obtained Si NCs embedded in SiN x after annealing.…”
Section: Photovoltaic Devicesmentioning
confidence: 69%
“…They obtained the Si NCs/SiC multilayers after high temperature annealing. The PCE of the solar cells reached 4.66% and the IQE at 400 nm was 35% which is higher than traditional c-Si cells [76] . Wu et al fabricated the P doped Si rich SiN films by ECR-CVD and obtained Si NCs embedded in SiN x after annealing.…”
Section: Photovoltaic Devicesmentioning
confidence: 69%
“…Most of the recent studies have focused on Si QDs embedded in SiO 2 or Si 3 N 4 matrix. [2][3][4] In comparison with SiO 2 and Si 3 N 4 , SiC matrix is conductive to carrier transport because of lower barrier height between neighboring Si QDs. 5 In the previous research, Si QDs embedded in a SiC matrix can be formed by magnetron co-sputtering, with subsequent high temperature thermal annealing.…”
Section: Introductionmentioning
confidence: 99%
“…The modifications of SMOs with suitable dielectric materials maximize the chemical passivation between electron and hole by dropping down the density of states, which lowers the chance of recombination of photo-excited electrons. [23][24][25][26] This concept has led to the fabrication of silicon nanocrystals by embedding them into the dielectric matrix. 23 The dielectric material also provides passivation utilizing high field-effect through the highly-dense quality of intrinsically fixed charges.…”
mentioning
confidence: 99%