Fabrication of sharp silicon hollow microneedles by deep-reactive ion etching towards minimally invasive diagnostics

Li, Yudong; Zhang, Hang; Yang, Ruyi; Laffitte, Yohan; Schmill, Ulises; Hu, Wenhan; Kaddoura, Moufeed; Blondeel, Eric J. M.; Cui, Bo

doi:10.1038/s41378-019-0077-y

Cited by 150 publications

(114 citation statements)

References 49 publications

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“…These MNs overcome the skin barrier functions and enhance drug permeability. The MN that have been prepared using these materials are: (i) solid [ 57 , 58 ], (ii) hollow [ 59 , 60 ] and (iii) coated MNs [ 61 ]. However, the above MNs suffer from various disadvantages like skin irritation and expensive fabrication processes [ 62 ].…”

Section: Mn Featuresmentioning

confidence: 99%

Mathematical Modelling, Simulation and Optimisation of Microneedles for Transdermal Drug Delivery: Trends and Progress

et al. 2020

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In the last two decades, microneedles (MNs) have received significant interest due to their potential for painless transdermal drug delivery (TDD) and minimal skin damage. MNs have found applications in a range of research and development areas in drug delivery. They have been prepared using a variety of materials and fabrication techniques resulting in MN arrays with different dimensions, shapes, and geometries for delivery of a variety of drug molecules. These parameters play crucial roles in determining the drug release profiles from the MNs. Developing mathematical modelling, simulation, and optimisation techniques is vital to achieving the desired MN performances. These will then be helpful for pharmaceutical and biotechnological industries as well as professionals working in the field of regulatory affairs focusing on MN based TDD systems. This is because modelling has a great potential to reduce the financial and time cost of both the MNs’ studies and manufacturing. For example, a number of robust mathematical models for predicting the performance of the MNs in vivo have emerged recently which incorporate the roles of the structural and mechanical properties of the skin. In addressing these points, this review paper aims to highlight the current status of the MN modelling research, in particular, the modelling, simulation and optimisation of the systems for drug delivery. The theoretical basis for the simulation of MN enhanced diffusion is discussed within this paper. Thus, this review paper provides a better understanding of the modelling of the MN mediated drug delivery process.

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Section: Mn Featuresmentioning

confidence: 99%

Mathematical Modelling, Simulation and Optimisation of Microneedles for Transdermal Drug Delivery: Trends and Progress

et al. 2020

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“…PMMA MNA with high aspect ratio, sharpness and various shapes are successfully prepared by PCT at one time. The second type is the fabrication method of the female MNA master mold, the tip part and the column part of the MNA are fabricated by silicon wet etching and UV-LIGA techniques, respectively [20]. The PDMS female mold is fabricated by the PDMS secondary transfer technology with the master mold.…”

Section: Of 13mentioning

confidence: 99%

Preparation of Microneedle Array Mold Based on MEMS Lithography Technology

Wang

Lai

et al. 2020

Micromachines

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As a transdermal drug delivery technology, microneedle array (MNA) has the characteristics of painless, minimally invasive, and precise dosage. This work discusses and compares the new MNA mold prepared by our group using MEMS technology. First, we introduced the planar pattern-to-cross-section technology (PCT) method using LIGA (Photolithography, Galvanogormung, Abformung) technology to obtain a three-dimensional structure similar to an X-ray mask pattern. On this basis, combined with polydimethylsiloxane (PDMS) transfer technology and electroplating process, metal MNA can be prepared. The second method is to use silicon wet etching combined with the SU-8 process to obtain a PDMS quadrangular pyramid MNA using PDMS transfer technology. Third method is to use the tilting rotary lithography process to obtain PDMS conical MNA on SU-8 photoresist through PDMS transfer technology. All three processes utilize parallel subtractive manufacturing methods, and the error range of reproducibility and accuracy is 2–11%. LIGA technology produces hollow MNA with an aspect ratio of up to 30, which is used for blood extraction and drug injection. The height of the MNA prepared by the engraving process is about 600 μm, which can achieve a sustained release effect together with a potential systemic delivery. The height of the MNA prepared by the ultraviolet exposure process is about 150 μm, which is used to stimulate the subcutaneous tissue.

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“…The MNs presented circular holes with diameters of 30 mm, and a depth of >300 mm was achieved via the efficient elimination of uorocarbon passivation polymers by ion bombardment. 35 In contrast, advances in additive manufacturing, such as 3D printing, have provided an alternative strategy to design and fabricat MNs with bespoke structures. [36][37][38] Yeung et al utilized stereolithographybased 3D printing to create hollow MNs interfaced with micro-uidic structures.…”

Section: Design and Fabrication Strategies Of Mnsmentioning

confidence: 99%