Stimulated by the current trend towards miniaturization, many researchers are carrying out studies on integrating nanodevices and microcircuits into electronic and optical systems. [1,2] Among the numerous materials being researched, TiO 2 has attracted the most interest due to its ideal properties, such as its strong absorption of ultraviolet light and photoluminescence, and its photocatalysis and optoelectronic conversion properties.[3±8] A micropattern of TiO 2 , especially one that has been fabricated on a flexible polymer substrate, has several useful applications that include: a UV filter for nanodevices; protecting semiconductor membranes; thin-film transistors (TFTs); and solar cells. It is expected that they will become basic components in optoelectronic applications, for example in flexible displays, microair vehicles (MAVs), etc. This is due to their numerous advantages, which include their suitability for any complex shape, minimum size, low power, and high performance. The traditional method for fabricating a micropattern is by etching inorganic functional films, but it is difficult to obtain high-resolution pattern edges and the substrate is often destroyed. To overcome this problem, photoenhanced chemical vapor deposition (CVD) and vapor transport were developed to fabricate the micropatterns via site-selective growth. [9,10] However, these processes required a high-temperature treatment, which was not suitable for polymer substrates. The object of this research was therefore to develop a novel process for fabricating micropatterns utilizing mild reaction conditions.The self-assembly process is a potential approach for meeting this demand. It can be used in the fabrication of inorganic micropatterns on both flexible and rigid substrates at low temperatures. In this process, self-assembled monolayers (SAMs) are fabricated on substrates and modified into hydrophilic/hydrophobic surfaces to act as templates. TiO 2 films are site-selectively deposited onto the templates to form micropatterns. The driving force of the site-selective growth is the difference in wettability of the hydrophilic/hydrophobic surfaces.[11±18]The formation of the TiO 2 film can be divided into two steps:Firstly, TiO 2 is nucleated on the templates; then the nuclei are grown into films. Figure 1 illustrates the mechanism of TiO 2 deposition. The hydrophilic surface of the template has an affinity to aqueous molecules. Ti-containing molecules can be adsorbed on hydrophilic surfaces and nucleate densely. These nuclei gradually grow up to form a layer of particles contacting each other, and then TiO 2 films are derived from this layer (Fig. 1a). In contrast, the hydrophobic surface of the template is repulsive to aqueous molecules, but this repulsion is not strong enough to prevent Ti-containing molecules from nucleating on it. However, the density is much lower than that on a hydrophilic surface. These nuclei grow up gradually and result in isolated particles, contaminating the hydrophobic surface (Fig. 1b).Undesired contaminating...