Fabrication of sawtooth diffraction gratings using nanoimprint lithography

Chang, Chih‐Hao; Heilmann, Ralf K.; Fleming, Robert C.; Carter, J.; Murphy, Edmond J.; Schattenburg, Mark L.; Bailey, Todd; Ekerdt, John G.; Frankel, Robert D.; Voisin, Ronald D.

doi:10.1116/1.1627814

Cited by 43 publications

(34 citation statements)

References 11 publications

Supporting

Mentioning

Contrasting

Unclassified

Order By: Relevance

“…We observe very good feature preservation in the replica with SEM and AFM and no obvious release damage. 19 Recent x-ray diffraction efficiency measurements on our first replicas (coated with Cr/Au) gave very promising results. 21 Some of the questions that need to be answered in the future are how well the features in the master are being replicated, how many good replicas can be made from a single master, and what kind of in-and out-of-plane distortions appear and can be tolerated when replicating larger area gratings.…”

Section: X-ray Energymentioning

confidence: 91%

“…Before patterning the wafer is covered with silicon nitride and a bi-level resist layer, consisting of anti-reflection coating (ARC) and photoresist. 19 The grating lines are parallel to the [110] direction. After transferring the grating pattern into nitride the substrate is etched in KOH, which anisotropically etches in the direction parallel to the (111) planes, potentially resulting in atomically smooth facets at the desired blaze angle.…”

Section: Fabrication Of Blazed Gratings For the Off-plane Geometrymentioning

confidence: 99%

See 1 more Smart Citation

Advances in reflection grating technology for Constellation-X

et al. 2004

Self Cite

View full text Add to dashboard Cite

The Reflection Grating Spectrometer (RGS) on Constellation-X will require thousands of large gratings with very exacting tolerances. Two types of grating geometries have been proposed. In-plane gratings have low ruling densities (∼ 500 l/mm) and very tight flatness and assembly tolerances. Off-plane gratings require much higher ruling densities (∼ 5000 l/mm), but have somewhat relaxed flatness and assembly tolerances and offer the potential of higher resolution and efficiency. The trade-offs between these designs are complex and are currently being studied. To help address critical issues of manufacturability we are developing a number of novel technologies for shaping, assembling, and patterning large-area reflection gratings that are amenable to low-cost manufacturing. In particular, we report results of improved methods for patterning the sawtooth grating lines that are required for efficient blazing, including the use of anisotropic etching of specially-cut silicon wafers to pattern atomically smooth grating facets. We also report on the results of using nanoimprint lithography as a potential means for replicating sawtooth grating masters. Our Nanoruler scanning beam interference lithography tool allows us to pattern large area gratings up to 300 mm in diameter. We also report on developments in grating assembly technology utilizing lithographically patterned and micromachined silicon metrology structures ("microcombs") that have achieved submicron assembly repeatability.

show abstract

Section: X-ray Energymentioning

confidence: 91%

Section: Fabrication Of Blazed Gratings For the Off-plane Geometrymentioning

confidence: 99%

Advances in reflection grating technology for Constellation-X

et al. 2004

Self Cite

View full text Add to dashboard Cite

show abstract

“…The gratings are 100 mm long in the axial direction and 85 mm wide in the dispersion direction. The blaze is obtained by etching down to the <111> crystal plane of a Si wafer 6,18 . The gratings are aligned within modules which are subsequently aligned and mounted to the petal.…”

Section: Optics and Optical Designmentioning

confidence: 99%

Arcus: an ISS-attached high-resolution x-ray grating spectrometer

et al. 2014

View full text Add to dashboard Cite

We present the design and scientific motivation for Arcus, an X-ray grating spectrometer mission to be deployed on the International Space Station. This mission will observe structure formation at and beyond the edges of clusters and galaxies, feedback from supermassive black holes, the structure of the interstellar medium and the formation and evolution of stars. The mission requirements will be R>2500 and >600 cm 2 of effective area at the crucial O VII and O VIII lines, values similar to the goals of the IXO X-ray Grating Spectrometer. The full bandpass will range from 8-52Å (0.25-1.5 keV), with an overall minimum resolution of 1300 and effective area >150 cm 2 . We will use the silicon pore optics developed at cosine Research and proposed for ESA's Athena mission, paired with off-plane gratings being developed at the University of Iowa and combined with MIT/Lincoln Labs CCDs. This mission achieves key science goals of the New Worlds, New Horizons Decadal survey while making effective use of the International Space Station (ISS).

show abstract

“…Thus, the nitride mask ensures that the original groove density and radial pattern is replicated on the silicon substrate while the KOH etch serves to sculpt an atomically smooth, blazed groove profile. This technique of using a nitride mask and a KOH wet etch has been previously used to produce blazed gratings (Chang et al 2003). The nitride strips are then removed with a hydrogen The OGRE g graze angle o should be ma approximatel achievable us actuators (Al…”

Section: Gratings For the Off-plane Mountmentioning

confidence: 99%

Pushing the boundaries of X-ray grating spectroscopy in a suborbital rocket

DeRoo¹,

McEntaffer

Schultz

et al. 2013

SPIE Proceedings

View full text Add to dashboard Cite

The Off-Plane Grating Rocket Experiment (OGRE) will greatly advance the current capabilities of soft X-ray grating spectroscopy and provide an important technological bridge towards future X-ray observatories. The OGRE sounding rocket will fly an innovative X-ray spectrograph operating at resolving powers of R ~ 2000 and effective areas > 100 cm 2 in the 0.2-1.5 keV bandpass. This represents a factor of two improvement in spectral resolution over currently operating instruments. OGRE will observe the astrophysical X-ray calibration source Capella, which has a linedominated spectrum and will showcase the full capabilities of the OGRE spectrograph. We outline the mission design for OGRE and provide detailed overviews of relevant technologies to be integrated into the payload, including slumped glass mirrors, blazed reflection gratings customized for the off-plane mount, and electron-multiplying CCDs (EMCCDs). The OGRE mission will bring these components to a high technology readiness level, paving the way for the use of such a spectrograph on future X-ray observatories or Explorer-class missions.

show abstract

Fabrication of sawtooth diffraction gratings using nanoimprint lithography

Cited by 43 publications

References 11 publications

Advances in reflection grating technology for Constellation-X

Advances in reflection grating technology for Constellation-X

Arcus: an ISS-attached high-resolution x-ray grating spectrometer

Pushing the boundaries of X-ray grating spectroscopy in a suborbital rocket

Contact Info

Product

Resources

About