FABRICATION OF PYROELECTRIC PVDF LINEAR ARRAYS FOR DIAGNOSTIC SYSTEMS OF HIGH POWER CO<sub>2</sub> LASER BEAMS

Capineri, Lorenzo; Masotti, L.; Mazzinghi, P.; Mazzoni, Marina

doi:10.1142/9789812792013_0072

Cited by 3 publications

(5 citation statements)

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“…Several research groups have used the laser machining method in the fabrication of PVDF sensors and actuators. Capineri et al [7] studied a laser ablation process on the PVDF film that provides a separation between elements of about 150 µm with negligible effects on the uniformity of the pyroelectric response. Chung et al [8] and Wang et al [9] applied a KrF excimer laser to pattern the aluminum electrodes from a 25 µm thick PVDF film to develop PVDF hydrophone sensing arrays and pressure sensors.…”

Section: Introductionmentioning

confidence: 99%

Femtosecond laser micromachining of polyvinylidene fluoride (PVDF) based piezo films

Lee

Bordatchev

Zeman

2008

J. Micromech. Microeng.

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Piezoelectric polymers have been known to exist for more than 40 years, but in recent years they have been recognized as smart materials for the fabrication of microsensors, microactuators and other micro-electro-mechanical systems (MEMS). In this work, femtosecond laser micromachining of a polyvinylidene fluoride (PVDF) film, coated with NiCu on both sides, has been studied to understand selective patterning mechanisms of NiCu layers and ablation characteristics of PVDF films. A detailed characterization of morphological changes of the laser-irradiated areas has been investigated using scanning electron microscopy. Through morphological analysis, the multiple shot damage thresholds of a 28 µm thick PVDF film and 40 nm thick NiCu layer have been determined. Surface morphology examination indicates that NiCu layers are removed from the PVDF film through a sequence of cracking-peeling off-curling. In addition, the NiCu layer on the rear side was also removed by the partially transmitted laser energy. The PVDF film was removed in forms of bundles of filaments and solid fragments by a combination of pure ablation and explosive removal of material by bursting of bubbles; the role of the explosive removal becomes more dominant with the increase of laser fluence. Optimal process conditions for cutting of the PVDF film and patterning of the NiCu coating without damaging the PVDF polymer have been established and applied to fabricate a vibration microsensor prototype that shows significant potential in using PVDF-based functional microdevices for telecommunications, transportation and biomedical applications.

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Section: Introductionmentioning

confidence: 99%

Femtosecond laser micromachining of polyvinylidene fluoride (PVDF) based piezo films

Lee

Bordatchev

Zeman

2008

J. Micromech. Microeng.

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“…The laser ablation technology has been already applied to ultrasonic transducers arrays for dividing the sensor into multiple elements [11], [12]. We carried out a laser ablation process on PVDF that provides a separation between elements of about 150 m with negligible effects on the uniformity of the pyroelectric response [13]. A schematic picture of the four quadrant sensor fabrication is shown in Fig.…”

Section: Characterization Of the Pvdf Four-quadrant Sensormentioning

confidence: 99%

“…Considering that at W cm , a permanent damage was observed [13], while at W cm , several runs of measurements performed for several hours did not alter the sensor response, the latter value of the intensity was considered a safe upper limit.…”

Section: Characterization Of the Pvdf Four-quadrant Sensormentioning

confidence: 99%

“…We used a similar technology [7] to develope a new four quadrant sensor with characteristics suitable for CO laser beams and a description of the sensor fabrication is reported in the following paragraph. This fabrication technology based on multilayer thick films allows the design of low-cost pyroelectric sensors with typical bandwidths at 6 dB from 4 Hz to 15 kHz [8] characterized by voltage responsivities with poles and zeros related to material properties [9], [10].…”

Section: Introductionmentioning

confidence: 99%

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CO/sub 2/ laser pulse monitoring instrument based on PVDF pyroelectric array

et al. 2005

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This paper proposes to extend the use of low-cost, pyroelectric, polyvinylidene fluoride four-quadrant arrays, originally devoted to monitoring the beam point stability of CO 2 laser beams, to the temporal profiling of the same laser pulse providing an instrument that is not commercially available. The advantage of using a single sensor for both types of measurements can be fully exploited if the pyroelectric sensor bandwidth is made almost flat in the typical frequency range (10 Hz-20 kHz) of the signal spectrum generated by a modulated CO 2 laser. In this paper, we present the design of an active analog compensation filter aimed to improve the reconstruction accuracy of the laser pulses and its circuit implementation with a quad operational amplifier for an easy integration of the compensation filter on the same board hosting the sensor. Experimental results obtained with modulated CO 2 laser beams, at pulse repetition rates from 10 to 1000 Hz and variable duty cycle, proved accurate in the laser pulse reconstruction with sensitivity of commercial semiconductor HgCdZnTe sensors.

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“…Several laser machining methods have been reported for advanced packaging applications. For example, Capineri et al (2000) describe a laser ablation process on polyvinylidene fluoride film that provides a 150 μ m separation between active elements with negligible effects on the uniformity of the pyroelectric response. Willis and Dreier (2009) reported the effect of laser micromachining of indium tin oxide (ITO) films on polymer substrates.…”

Section: Introductionmentioning

confidence: 99%

Laser processing of materials: a new strategy toward materials design and fabrication for electronic packaging

2010

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PurposeMaterial formulation, structuring and modification are key to increasing the unit volume complexity and density of next generation electronic packaging products. Laser processing is finding an increasing number of applications in the fabrication of these advanced microelectronic devices. The purpose of this paper is to discuss the development of new laser‐processing capabilities involving the synthesis and optimization of materials for tunable device applications.Design/methodology/approachThe paper focuses on the application of laser processing to two specific material areas, namely thin films and nanocomposite films. The examples include BaTiO3‐based thin films and BaTiO3 polymer‐based nanocomposites.FindingsA variety of new regular and random 3D surface patterns are highlighted. A frequency‐tripled Nd:YAG laser operating at a wavelength of 355 nm is used for the micromachining study. The micromachining is used to make various patterned surface morphologies. Depending on the laser fluence used, one can form a “wavy,” random 3D structure, or an array of regular 3D patterns. Furthermore, the laser was used to generate free‐standing nano and micro particles from thin film surfaces. In the case of BaTiO3 polymer‐based nanocomposites, micromachining is used to generate arrays of variable‐thickness capacitors. The resultant thickness of the capacitors depends on the number of laser pulses applied. Micromachining is also used to make long, deep, multiple channels in capacitance layers. When these channels are filled with metal, the spacings between two metallized channels acted as individual vertical capacitors, and parallel connection eventually produce vertical multilayer capacitors. For a given volume of capacitor material, theoretical capacitance calculations are made for variable channel widths and spacings. For comparison, calculations are also made for a “normal” capacitor, that is, a horizontal capacitor having a single pair of electrodes.Research limitations/implicationsThis technique can be used to prepare capacitors of various thicknesses from the same capacitance layer, and ultimately can produce variable capacitance density, or a library of capacitors. The process is also capable of making vertical 3D multilayer embedded capacitors from a single capacitance layer. The capacitance benefit of the vertical multilayer capacitors is more pronounced for thicker capacitance layers. The application of a laser processing approach can greatly enhance the utility and optimization of new materials and the devices formed from them.Originality/valueLaser micromaching technology is developed to fabricate several new structures. It is possible to synthesize nano and micro particles from thin film surfaces. Laser micromachining can produce a variety of random, as well as regular, 3D patterns. As the demand grows for complex multifunctional embedded components for advanced organic packaging, laser micromachining will continue to provide unique opportunities.

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FABRICATION OF PYROELECTRIC PVDF LINEAR ARRAYS FOR DIAGNOSTIC SYSTEMS OF HIGH POWER CO₂ LASER BEAMS

Cited by 3 publications

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Femtosecond laser micromachining of polyvinylidene fluoride (PVDF) based piezo films

Femtosecond laser micromachining of polyvinylidene fluoride (PVDF) based piezo films

CO/sub 2/ laser pulse monitoring instrument based on PVDF pyroelectric array

Laser processing of materials: a new strategy toward materials design and fabrication for electronic packaging

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FABRICATION OF PYROELECTRIC PVDF LINEAR ARRAYS FOR DIAGNOSTIC SYSTEMS OF HIGH POWER CO2 LASER BEAMS

Cited by 3 publications

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Femtosecond laser micromachining of polyvinylidene fluoride (PVDF) based piezo films

Femtosecond laser micromachining of polyvinylidene fluoride (PVDF) based piezo films

CO/sub 2/ laser pulse monitoring instrument based on PVDF pyroelectric array

Laser processing of materials: a new strategy toward materials design and fabrication for electronic packaging

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Product

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FABRICATION OF PYROELECTRIC PVDF LINEAR ARRAYS FOR DIAGNOSTIC SYSTEMS OF HIGH POWER CO₂ LASER BEAMS