Fabrication of polymer based integrated photonic devices by maskless lithography

Abstract

We present our recent results on the fabrication of photonic devices such as single-mode and few-mode waveguides, Ycouplers as well as integrated interferometric sensor devices. The devices were created by means of a fabrication method based on maskless lithography, which allows for fabricating embedded integrated polymer elements on a scale of several square centimeters with a resolution down to one micron. We demonstrate the versatility of our approach by presenting first results on photonic structures created by maskless lithography.

Towards fabrication and application of polymer based photonics networks and sensors

“…Left: Photograph of the maskless photolithographic setup utilized for waveguide fabrication. Right: Hot embossing process based on master tools produced via maskless lithography (from[16]). b) Maskless Photolithography…”

“…Microscope images of Ormocomp structures fabricated by maskless lithography: linear waveguide array (left) as well as Y-splitters and Mach-Zehnder interferometers (middle). Right: enlargement of the area indicated by the red box in the middle panel (from[16]). …”