1983
DOI: 10.1109/jqe.1983.1071814
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Fabrication of planar dielectric waveguides with high optical damage threshold

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Cited by 42 publications
(20 citation statements)
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“…A waveguide is not itself an integrated-optical device, and in order to determine the effective refractive indices N some way of coupling light from an external beam into the waveguide is needed (Tien, 1977). For this, a grating coupler is very convenient, especially since the problem of fabricating low-cost, high resolution gratings was solved (Herrmann & Wildmann, 1983 ;Lukosz & Tiefenthaler, 1983 ;Heuberger & Lukosz, 1986). The grating is an integral part of the waveguide, to which it allows unencumbered access by proteins.…”
Section: Integrated Optics (10)mentioning
confidence: 99%
“…A waveguide is not itself an integrated-optical device, and in order to determine the effective refractive indices N some way of coupling light from an external beam into the waveguide is needed (Tien, 1977). For this, a grating coupler is very convenient, especially since the problem of fabricating low-cost, high resolution gratings was solved (Herrmann & Wildmann, 1983 ;Lukosz & Tiefenthaler, 1983 ;Heuberger & Lukosz, 1986). The grating is an integral part of the waveguide, to which it allows unencumbered access by proteins.…”
Section: Integrated Optics (10)mentioning
confidence: 99%
“…Typical photonic structures used in sensing applications include planar waveguides, capillary sensors, and arrays (Borisov and Wolfbeis, 2008;Wolfbeis, 1991). While these optical sensing components have traditionally been fabricated with inorganic materials such as silica, lithium niobate, and other semiconductors and glasses (Herrmann and Wildmann, 1983), polymeric materials are becoming increasingly popular due to simple fabrication, flexible mechanical properties, and lower costs. Additionally, the moldable nature of polymers makes it possible to fabricate optically relevant nanostructured materials such as diffractive structures, while enabling the use of varied substrates and better control of film thickness and size (Chen, 1993;Ma et al, 2002).…”
Section: Introductionmentioning
confidence: 99%
“…Work in this area was originally performed on thin planar guides in TiO -SiO [47]- [50]. Buried channel guides have been formed by densification using an infrared (IR) laser [51]- [54] and by ultraviolet (UV) exposure of silica hybridized with a photopolymerizable organic [55], [56].…”
Section: Sol-gel Silica-on-siliconmentioning
confidence: 99%
“…Thick layers of silicate glasses can be formed as multilayers by repetitive use of spin-coating and rapid thermal annealing (SC-RTA), with careful control of the annealing temperature [47]. These layers may then be formed into buried channel guides by reactive ion etching and burial [60], [61].…”
Section: Sol-gel Silica-on-siliconmentioning
confidence: 99%