2016
DOI: 10.1016/j.tsf.2016.08.042
|View full text |Cite
|
Sign up to set email alerts
|

Fabrication of optically smooth Sn thin films

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
1
1

Citation Types

0
3
0

Year Published

2017
2017
2022
2022

Publication Types

Select...
5
1

Relationship

3
3

Authors

Journals

citations
Cited by 9 publications
(3 citation statements)
references
References 10 publications
0
3
0
Order By: Relevance
“…(1) The evaporated samples were made using a Denton vacuum thermal evaporator (DV-502A turbo auto high vacuum evaporator) and Sn pellets (from Kurt J. Lesker) of 99.999% purity. Following the recipe described in earlier publications, [26][27][28] we used 3 mm thick Pilkington TEC-15 glass (soda lime glass, coated with Fluorine doped Tin Oxide with a sheet resistance of 15 Ω/ ) as a substrate. The film thickness was close to 250 nm as determined with a quartz crystal microbalance thickness monitor.…”
Section: A Sample Preparationmentioning
confidence: 99%
“…(1) The evaporated samples were made using a Denton vacuum thermal evaporator (DV-502A turbo auto high vacuum evaporator) and Sn pellets (from Kurt J. Lesker) of 99.999% purity. Following the recipe described in earlier publications, [26][27][28] we used 3 mm thick Pilkington TEC-15 glass (soda lime glass, coated with Fluorine doped Tin Oxide with a sheet resistance of 15 Ω/ ) as a substrate. The film thickness was close to 250 nm as determined with a quartz crystal microbalance thickness monitor.…”
Section: A Sample Preparationmentioning
confidence: 99%
“…NiO layer is then deposited on the NSL samples by reactive radio frequency magnetron sputtering of a 99.99% pure-Ni target in a 20:80 oxygen to argon partial pressure to a thickness of 100 nm [35]. Finally, a 250 nm (±40 nm) Sn layer is deposited on NSL and control samples simultaneously by vacuum evaporation of 99.999% pure Sn (from Kurt J Lesker) as described elsewhere [36]. The evaporation steps of Cu and Sn were carried out in a Denton Vacuum machine (model DV-502A) at a base vacuum of (3.5-4.8) × 10 −6 Pa.…”
Section: Methodsmentioning
confidence: 99%
“…Sn samples were prepared by vacuum evaporation of 99.999% pure Sn (from Kurt J. Lesker) from tungsten boats onto the substrates; the detailed fabrication process steps are described in Ref. 10. Sn layers of 250±25nm thickness were deposited at a growth rate of 2-4 Å/s through stainless steel masks, resulting in a set of 5 mm wide Sn strips over continuous TCO coating.…”
mentioning
confidence: 99%