Abstract:Sub-5 nm nanopores are widely used in singlemolecule detections for biological and chemical applications. However, the traditional fabrication methods are difficult to reduce pore size to sub-5 nm. Focused electron beam irradiation inside a transmission electron microscope (TEM) is verified experimentally to be an effectively straightforward way to fabricate such small pores. The fabrication process can be explained by a simple physical collision model. We also fabricate graphene nanopores under various temper… Show more
“…To obtain smaller graphene nanopores such as those with the sizes of sub-5 nm, shrinkage of the graphene nanopores has been realized in the temperature range of 400–1200 °C by setting the irradiation energies. 131 To further increase the crystallization of the graphene layers, various pore-forming temperatures have been applied in the apparatus. The utilization of a helium ion beam (HIM) led to the generation of ultrasmall (∼3.7 nm) graphene nanopores given that the diameter of the ion source beam can reach as small as ∼0.5 nm with an accelerating voltage of 30–35 kV (Fig.…”
In the past decades nanometer-scale pores have been employed as a powerful tool for sensing biological molecules. In pursuit of such a technology, a variety of nanotechnology-based approaches have been...
“…To obtain smaller graphene nanopores such as those with the sizes of sub-5 nm, shrinkage of the graphene nanopores has been realized in the temperature range of 400–1200 °C by setting the irradiation energies. 131 To further increase the crystallization of the graphene layers, various pore-forming temperatures have been applied in the apparatus. The utilization of a helium ion beam (HIM) led to the generation of ultrasmall (∼3.7 nm) graphene nanopores given that the diameter of the ion source beam can reach as small as ∼0.5 nm with an accelerating voltage of 30–35 kV (Fig.…”
In the past decades nanometer-scale pores have been employed as a powerful tool for sensing biological molecules. In pursuit of such a technology, a variety of nanotechnology-based approaches have been...
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