Fabrication of Nanopatterns in a-AlO_x Thin Films by a Single Laser Pulse

Abstract

Large area ordered nanopatterning of RF sputter deposited amorphous AlOxfilms has been carried out. The technique involves UV laser treatment of the samples through LB films of silica nanospheres. The hexagonal, close packed arrangement of the spheres was projected to the surface due to the laser treatment resulting in ordered structure of pits of ~200 nm diameter and 1,3 nm depth. The samples were caracterized by means of AFM and XTEM. The experimental results are in good agreement with the simulations.