2013
DOI: 10.1016/j.matlet.2012.12.107
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Fabrication of nano-porous silicon using alkali etching process

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Cited by 23 publications
(17 citation statements)
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“…The presence of the Si-OH group is proof of bonded water. The very strong and broad FTIR band at 1082 cm −1 is usually assigned to Si-O-Si asymmetric stretching vibrations (Kashyout et al 2013), and (Kashyout et al 2018). The band at 789 cm −1 can be assigned to Si-O-Si symmetric stretching vibrations (Trivedi et al 2015), whereas the FTIR band at 470 cm −1 is due to O-Si-O bending vibrations (Hernández-Ortiz et al 2015).…”
Section: Resultsmentioning
confidence: 99%
“…The presence of the Si-OH group is proof of bonded water. The very strong and broad FTIR band at 1082 cm −1 is usually assigned to Si-O-Si asymmetric stretching vibrations (Kashyout et al 2013), and (Kashyout et al 2018). The band at 789 cm −1 can be assigned to Si-O-Si symmetric stretching vibrations (Trivedi et al 2015), whereas the FTIR band at 470 cm −1 is due to O-Si-O bending vibrations (Hernández-Ortiz et al 2015).…”
Section: Resultsmentioning
confidence: 99%
“…General system descriptions: The various structures were prepared using electrochemical etching method. However, nanostructures can also 10,11 be achieved with only chemical etching, but with longer time, whereas electrochemical etching method requires less etching time. From our experiment, it is deduced that bigger pores could also be achieved with ordinary chemical etching, but chemical additives such as platinum are necessary to be added to the HF solution in order to enhance the etching potential.…”
Section: Methodsmentioning
confidence: 99%
“…In case of n-propanol addition to KOH etchant resulted in remarkable improvement of porosity morphology of (100) surfaces, which is produced by transformation from Si (211) plane to Si (100) plane, more than IPA addition [7]. Then, the regularity of porosity in silicon samples as a result of using n-propanol replaced of IPA (as shown in Figure 4), because of the differences in mechanism of anisotropic etching process of Si wafers.…”
Section: Etching Rates In Various Systemsmentioning
confidence: 99%
“…In this paper, porous silicon have been produced depending on our previous study [7], using alkali media that is preferable with respect to the disadvantages of using HF with its toxicity, corrosivity and hazardous to water. The main factors affecting the production of porous silicon from single crystal silicon as a result of anisotropic etching like concentration of etchant (KOH), concentration of wetting agent (Iso-propanol, n-propanol), temperature of etching process and time of etching are studied and investigated.…”
Section: Pore Shapementioning
confidence: 99%
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