Fabrication of nano-dot- and nano-ring-arrays by nanosphere lithography

Winzer, M.; Kleiber, M.; Dix, N.; Wiesendanger, R.

doi:10.1007/bf01567218

Cited by 77 publications

(77 citation statements)

References 11 publications

Supporting

Mentioning

Contrasting

Unclassified

Order By: Relevance

“…[28] However, there are limitations for patterning hybrid multilayered structures and fabricating hierarchical patterns using CCACN, ªmicromolding in capillariesº (MIMIC), [29] ªmicrofluidic networkº (lFN), [30,31] micro/nanosphere lithography, [2,17,32,33] and controllable wetting approaches.…”

Section: Receivedmentioning

confidence: 99%

Colloidal‐Crystal‐Assisted Imprint for Mesoscopic Structured Arrays and Hierarchical Patterns

et al. 2004

View full text Add to dashboard Cite

Characterization: XRD patterns were recorded on a Scintag diffractometer operated at 35 kV voltage and 30 mA current with Cu Ka radiation (k = 1.54178 ). SEM images were taken on a Hitachi S-3500N scanning electron microscope. TEM images were obtained with a Philips 420 transmission electron microscope with an accelerating voltage of 120 kV. HRTEM micrographs, SAED patterns, and EDS spectra were taken on a JEOL-20l0F transmission electron microscope operated at 200 kV. [1±4] fabricating biological and chemical sensors, [5,6] and controlling crystallization. [7,8] Existing elegant approaches involving lithography, imprint, and soft lithography techniques have been successfully applied for creating patterned surfaces in microelectronics and plastic electronics. Received[9±20] In particular, imprinting is an interesting approach because of its scalable, parallel, cost-effective, and promising low-cost device applications. Meanwhile, high-resolution templates and simpler patterning processes are becoming more attractive for mesoscale imprinting and patterning multilayered hybrid films. As we know, three-dimensional colloidal crystals, the versatile templates and scaffolds, have prompted a creative surge in threedimensionally structured materials such as photonic bandgap materials and multiporous materials.[21±27] However, three-dimensional colloidal crystals, to the best of our knowledge, have not been used as templates for mesoscopic imprinting and patterning. Recently, we reported that three-dimensional colloidal crystals could be intentionally utilized to fabricate two-dimensional mesoscopic arrays and self-assembled monolayers via the ªcolloidal-crystal-assisted capillary nanofabricationº (CCACN) method.[28] However, there are limitations for patterning hybrid multilayered structures and fabricating hierarchical patterns using CCACN, ªmicromolding in capillariesº (MIMIC), [29] ªmicrofluidic networkº (lFN), [30,31] micro/nanosphere lithography, [2,17,32,33] and controllable wetting approaches.[34±37]The colloidal-crystal-assisted imprint (CCAIP) approach is generally applicable: it develops a parallel mesoscopic surface fabrication or imprinting approach and also facilitates threedimensional colloidal crystals to generate meso-and even COMMUNICATIONS

show abstract

Section: Receivedmentioning

confidence: 99%

Colloidal‐Crystal‐Assisted Imprint for Mesoscopic Structured Arrays and Hierarchical Patterns

et al. 2004

View full text Add to dashboard Cite

show abstract

“…Recent experimental and theoretical progress relevant to the present proposal includes studies of the role of entropy and interparticle interaction in affecting self-assembly 1 and directed assembly in systems of monodisperse hard-spheres, [2][3][4][5][6][7][8][9][10][11][12] particle suspensions with added particles or polymers, monodisperse emulsions with added polymer, 41,43 binary emulsions, 38 suspensions of rod-like particles in mixtures of spheres, [53][54][55][56][57][58][59][60] liquid crystal emulsions, [61][62][63] and charged-stabilized particle suspensions. [64][65][66][67][68][69][70][71] Research on these substances is also driven by a variety of practical applications (see for example [72] and references therein) ranging from the prospect of using these materials as templates for photonic materials [73][74][75] and lithography, 76,77 to their uses in ceramics and as biochemical sensors. 78,79 In a different vein, studies of complex fluids are increasingly stimulated by analogies from cell biology, 80,…”

Section: Brief Overview Of Scientific Topic and Brief Literature Surveymentioning

confidence: 99%

“…1,72,104,[142][143][144][145][146][147][148][149][150][151][152][153][154][155] Particle arrays can also be used indirectly, as templates to create novel macroporous materials. Besides the use of the resulting inverse structures in photonics, 77,[156][157][158][159][160][161][162][163][164] precision macroporous materials have a wide range of potential chemical applications. For example, macroporous polymers have been used as catalytic surfaces and supports, 165,166 separation and adsorbent media, [167][168][169] biomaterials, [170][171][172][173] and chromatographic materials.…”

Section: Near-perfect Colloidal Crystalsmentioning

confidence: 99%

“…Similarly, templating on earth has been used with some success to nucleate well-ordered crystals of specific particle types. Nevertheless it is more common that defects arise in practice, including point defects, dislocations, stacking defects, twinning planes; polycrystalline samples are common and many practical limitations arise that are unique to different processing schemes 76,77,112,115, -especially when the samples are dried or during solvent exchange, e.g., microcracking, limiting crystal thickness, and local lattice distortions. The detrimental affects of such defects on three-dimensionally ordered colloidal devices are poorly understood.…”

Section: Near-perfect Colloidal Crystalsmentioning

confidence: 99%

See 1 more Smart Citation

Entropically driven self-assembly of colloidal crystals on templates in space

Zimmerli

Yodh

2001

2001 Conference and Exhibit on International Space Station Utilization

View full text Add to dashboard Cite

“…Such a hexagonally closepacked monolayer of particles acts as an excellent mask for lithography techniques. Various patterning techniques have been reported utilizing NSL (4,5).…”

Section: Introductionmentioning

confidence: 99%

Synthesis of Microscale Lead Sulfide Disks by Patterned Self-Assembled Monolayer

et al. 2009

View full text Add to dashboard Cite

This work explores an approach to utilize nanosphere lithography (NSL) and atomic layer deposition (ALD) to fabricate an array of microscale disks of lead sulfide (PbS). In this approach, a mold to fabricate polymer stamps was produced by NSL. Using these stamps a patterned self-assembled monolayer (SAM) of octadecyltrichlorosilane (ODTS) was deposited using microcontact printing. The ODTS SAM functioned as a resist to block the growth of ALD PbS. The resulting PbS disks were characterized by scanning electron microscopy (SEM) and Auger electron spectroscopy (AES) to confirm the morphology and stoichiometry. Regular arrays of microscale PbS disks were successfully fabricated. This is a potentially attractive methodology for fabrication of multi-layer devices.

show abstract

Fabrication of nano-dot- and nano-ring-arrays by nanosphere lithography

Cited by 77 publications

References 11 publications

Colloidal‐Crystal‐Assisted Imprint for Mesoscopic Structured Arrays and Hierarchical Patterns

Colloidal‐Crystal‐Assisted Imprint for Mesoscopic Structured Arrays and Hierarchical Patterns

Entropically driven self-assembly of colloidal crystals on templates in space

Synthesis of Microscale Lead Sulfide Disks by Patterned Self-Assembled Monolayer

Contact Info

Product

Resources

About