2003
DOI: 10.1116/1.1584037
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Fabrication of microstructured copper on an indium–tin–oxide surface using a micropatterned self-assembled monolayer as a template

Abstract: The difference in chemical reactivity between indium–tin–oxide (ITO) and self-assembled monolayer (SAM) surfaces was used to fabricate copper (Cu) microstructures. ITO substrates coated with octadecyltrimethoxysilane (ODS)–SAM were photolithographically micropatterned using vacuum ultraviolet (VUV) light. Each of the micropatterned samples was subsequently immersed in an electrodeposition bath in order to deposit Cu on its surface. As confirmed by atomic force microscopy, Cu electrodeposition proceeded selecti… Show more

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Cited by 10 publications
(5 citation statements)
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“…Various kinds of thin films of ceramic oxides have been deposited on SAMs with different functional groups by the bioinspired process at temperatures lower than 100 °C. The representatives are TiO 2 , ,,41a,42a,,, ZrO 2 , , SnO 2 , , , Y 2 O 3 , ZnO, La 2 O 3 , Ta 2 O 3 , iron oxides including FeOOH, ,48f, Fe 2 O 3 , and Fe 3 O 4 , , along with complex oxides such as SrTiO 3 , CaCO 3 , ,, apatite, ,106a,106c,173a-c and others. 17...…”
Section: Experimental Procedures and Examplesmentioning
confidence: 99%
“…Various kinds of thin films of ceramic oxides have been deposited on SAMs with different functional groups by the bioinspired process at temperatures lower than 100 °C. The representatives are TiO 2 , ,,41a,42a,,, ZrO 2 , , SnO 2 , , , Y 2 O 3 , ZnO, La 2 O 3 , Ta 2 O 3 , iron oxides including FeOOH, ,48f, Fe 2 O 3 , and Fe 3 O 4 , , along with complex oxides such as SrTiO 3 , CaCO 3 , ,, apatite, ,106a,106c,173a-c and others. 17...…”
Section: Experimental Procedures and Examplesmentioning
confidence: 99%
“…1(a)) by VUV light according to the following procedure [26,27]. A SiO 2 /Si substrate covered with an AHAPS-SAM was placed in a chamber equipped with an excimer lamp (Ushio Electric, UER20-172V, k = 172 nm and 10 mW/cm 2 ).…”
Section: Micropatterningmentioning
confidence: 99%
“…In recent years, the molecular self-assembly method has been used to modify metal surfaces for specific electrochemical applications such as templates for metal nanoparticle electrodepositions [1][2][3][4][5][6][7][8][9], corrosion inhibition [10][11][12][13][14][15] and electrochemical sensors [16][17][18][19][20][21]. A review of the formation and structure of self-assembly monolayers (SAM) was given by Ulman [22] and Kubota and co-workers [21], who investigated their application as electrochemical sensors.…”
Section: Introductionmentioning
confidence: 99%