Fabrication of microlens array on 6H-SiC mold by an integrated microcutting-etching process

Zhou, Tianfeng; Xu, Ruzhen; Ruan, Benshuai; Liang, Zhiqiang; Wang, Xibin

doi:10.1016/j.precisioneng.2018.06.008

Cited by 12 publications

(4 citation statements)

References 12 publications

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“…Greyscale lithography [34] and thermal scanning probe lithography [35] have been studied for the fabrication of 3D microstructures, such as microlenses, v-grooves, and pyramids. The direct production of microstructures on photoresist [36] and metal [37] masks via single-point diamond cutting has been proposed, and microlens structures have been successfully produced on Si via dry etching pattern transfer, as shown in figure 6. (a) Line-like grooves superimposed on a pre-machined microstructure by the two-beam interference method and (b) the cross-section profile of the grooves [42].…”

Section: Wet Etchingmentioning

confidence: 99%

A review of the techniques for the mold manufacturing of micro/nanostructures for precision glass molding

Zhou

Wang

et al. 2021

Int. J. Extrem. Manuf.

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Micro/nanostructured components play an important role in micro-optics and optical engineering, tribology and surface engineering, and biological and biomedical engineering, among other fields. Precision glass molding technology is the most efficient method of manufacturing micro/nanostructured glass components, the premise of which is meld manufacturing with complementary micro/nanostructures. Numerous mold manufacturing methods have been developed to fabricate extremely small and high-quality micro/nanostructures to satisfy the demands of functional micro/nanostructured glass components for various applications. Moreover, the service performance of the mold should also be carefully considered. This paper reviews a variety of technologies for manufacturing micro/nanostructured molds. The authors begin with an introduction of the extreme requirements of mold materials. The following section provides a detailed survey of the existing micro/nanostructured mold manufacturing techniques and their corresponding mold materials, including nonmechanical and mechanical methods. This paper concludes with a detailed discussion of the authors recent research on nickel-phosphorus (Ni-P) mold manufacturing and its service performance.

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Section: Wet Etchingmentioning

confidence: 99%

A review of the techniques for the mold manufacturing of micro/nanostructures for precision glass molding

Zhou

Wang

et al. 2021

Int. J. Extrem. Manuf.

Self Cite

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show abstract

“…6H-SiC has excellent comprehensive properties of high strength, high hardness, corrosion resistance, high temperature resistance and a small dielectric constant [1][2][3], and is widely used in aerospace, weapons and equipment, biomedicine, integrated circuits, and other sophisticated fields [4][5][6]. In the actual indentation process, it is difficult to measure the changes in dislocation, shear strain and other values in the whole process and thus they cannot be systematically analyzed [7][8][9].…”

Section: Introductionmentioning

confidence: 99%

Dislocation Analysis of Nanoindentation on Different Crystal Planes of 6H-SiC Based on Molecular Dynamics Simulation

et al. 2022

Crystals

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In order to explore the deformation law of nanoindentation dislocation on different crystal planes of 6H-SiC by cube indenter at high temperature, the (0001), (11¯00) and (21¯1¯0) crystal planes were simulated by molecular dynamics, and changes of dislocation and shear stress under different crystal planes were analyzed. With the deepening of indentation depth, the formation of dislocations on different indentation surfaces has a certain repeatability. The crystal plane (0001) continuously generates horizontal dislocations around the indentation, (11¯00) the crystal plane generates two square dislocation rings moving downward at a time, and (21¯1¯0) the crystal plane generates one square dislocation ring moving downward at a time.

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“…Lee et al [ 27 ] described the fabrication of a glassy carbon (GC) mold with a microchannel pattern that was produced using micromachining in an electrolytic medium. Zhou et al [ 28 ] reported a silicon carbide (SiC) mold with a microlens array (MLA) using micromachining and RIE. The fabrication techniques used to produce these molds have certain advantages and disadvantages in terms of optimizing the aspect ratio, surface roughness, geometric texture, and, most importantly, processing costs of the molds.…”

Section: Introductionmentioning

confidence: 99%

A Comprehensive Review of Micro/Nano Precision Glass Molding Molds and Their Fabrication Methods

et al. 2021

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Micro/nano-precision glass molding (MNPGM) is an efficient approach for manufacturing micro/nanostructured glass components with intricate geometry and a high-quality optical finish. In MNPGM, the mold, which directly imprints the desired pattern on the glass substrate, is a key component. To date, a wide variety of mold inserts have been utilized in MNPGM. The aim of this article is to review the latest advances in molds for MNPGM and their fabrication methods. Surface finishing is specifically addressed because molded glass is usually intended for optical applications in which the surface roughness should be lower than the wavelength of incident light to avoid scattering loss. The use of molds for a wide range of molding temperatures is also discussed in detail. Finally, a series of tables summarizing the mold fabrication methods, mold patterns and their dimensions, anti-adhesion coatings, molding conditions, molding methods, surface roughness values, glass substrates and their glass transition temperatures, and associated applications are presented. This review is intended as a roadmap for those interested in the glass molding field.

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Fabrication of microlens array on 6H-SiC mold by an integrated microcutting-etching process

Cited by 12 publications

References 12 publications

A review of the techniques for the mold manufacturing of micro/nanostructures for precision glass molding

A review of the techniques for the mold manufacturing of micro/nanostructures for precision glass molding

Dislocation Analysis of Nanoindentation on Different Crystal Planes of 6H-SiC Based on Molecular Dynamics Simulation

A Comprehensive Review of Micro/Nano Precision Glass Molding Molds and Their Fabrication Methods

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