Fabrication of micro DOE using micro tools shaped with focused ion beam

Xu, Zongwei; Fang, Fengzhou; Zhang, Sujuan; Zhang, X. D.; Hu, Xiaotang; Fu, Yusheng; Li, L.

doi:10.1364/oe.18.008025

Cited by 55 publications

(30 citation statements)

References 9 publications

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“…They successfully fabricated a variety of micro-cutting tools with dimensions in the range of 15-100 mm and a cutting edge of 40 nm in radius. To machine micro-diffractive optical elements, Xu et al [94] used FIB micro-milling to fabricate microcutting tools with edge radius of around 25 nm with complex shapes as shown in Fig. 13.…”

Section: Fib-machiningmentioning

confidence: 99%

Recent advances in micro- and nano-machining technologies

Gao

Huang

2017

Front. Mech. Eng.

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Device miniaturization is an emerging advanced technology in the 21st century. The miniaturization of devices in different fields requires production of micro-and nano-scale components. The features of these components range from the sub-micron to a few hundred microns with high tolerance to many engineering materials. These fields mainly include optics, electronics, medicine, bio-technology, communications, and avionics. This paper reviewed the recent advances in micro-and nano-machining technologies, including micro-cutting, micro-electrical-discharge machining, laser micro-machining, and focused ion beam machining. The four machining technologies were also compared in terms of machining efficiency, workpiece materials being machined, minimum feature size, maximum aspect ratio, and surface finish.

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Section: Fib-machiningmentioning

confidence: 99%

Recent advances in micro- and nano-machining technologies

Gao

Huang

2017

Front. Mech. Eng.

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“…Periodic micro grooves [4], arrays [5], and diffraction gratings [6] have been successfully obtained by using micro multi-tip tools fabricated by FIB (with tool tip dimensions ranging from 15 µm to 100 µm). Recently, nano-gratings with pitch of 150 nm can be generated by this technique when using nanoscale multi-tip diamond tools [7,8].…”

Section: Introductionmentioning

confidence: 99%

Investigation of a scale-up manufacturing approach for nanostructures by using a nanoscale multi-tip diamond tool

Tong

Luo

Sun

et al. 2015

Int J Adv Manuf Technol

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Increasing interest in commercializing functional nanostructured devices heightens the need for cost effective manufacturing approaches for nanostructures. This paper presents an investigation of a scale-up manufacturing approach for nanostructures through diamond turning using a nanoscale multi-tip diamond tool (four tip tool with tip width of 150 nm) fabricated by focused ion beam (FIB). The manufacturing capacity of this new technique is evaluated through a series of cutting trials on copper substrates under different cutting conditions (depth of cut 100-500 nm, spindle speed 12-120 rpm). The machined surface roughness and nanostructure patterns are measured by using a white light interferometer and a scanning electron microscope, respectively. Results show that the form accuracy and integrity of the machined nanostructures were degraded with the increase of the depth of cut and the cutting speed. The burr and the structure damage are two major machining defects. High precision nano-grooves (form error of bottom width < 6.7 %) was achieved when a small depth of cut of 100 nm was used (spindle speed = 12 rpm). Initial tool wear was found at both the clearance cutting edge and the side edges of tool tips after a cutting distance of 2.5 km. Moreover, the nanometric cutting process was emulated by molecular dynamics (MD) simulations. The research findings obtained from MD simulation reveal the underlying mechanism for machining defects and the initialization of tool wear observed in experiments.

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“…Diamond turning using multi-tip single crystal diamond tools, as a new machining technique, shows powerful capacity in the fabrication of micro/nano structures [4][5][6][7]. In recent decades, various kinds of micro multi-tip tools (with tool tip dimensions ranging from 15 µm to 100 µm) fabricated by the FIB milling technique were successfully applied to form well-ordered micro grooves [4][5], arrays [6], and diffraction gratings [7].…”

Section: Introductionmentioning

confidence: 99%

“…In recent decades, various kinds of micro multi-tip tools (with tool tip dimensions ranging from 15 µm to 100 µm) fabricated by the FIB milling technique were successfully applied to form well-ordered micro grooves [4][5], arrays [6], and diffraction gratings [7]. Recently nano-gratings with the pitch as lower as 150 nm were fabricated using a nanoscale multi-tip diamond tool through the diamond turning operations [8].…”

Section: Introductionmentioning

confidence: 99%

“…As the nanostructures are formed synchronously within a single cutting pass, the interactions of the deformed layers created by each tool tip might alter the material removal mechanism [9] and result in unpredictable processing defects. Although a few reports can be found in the literature preliminarily describing the high form accuracy and throughput of this technique [4][5][6][7][8], no experimental or theoretical research work has been found which investigated the dependence of 3 the form accuracy of machined nanostructures on the tool geometrical parameters. The characterization of the shape transferability of this technique is needed before the standardization and commercialization of nanocale multi-tip diamond tools.…”

Section: Introductionmentioning

confidence: 99%

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Investigation of the shape transferability of nanoscale multi-tip diamond tools in the diamond turning of nanostructures

Luo

Tong

Liang

2014

Applied Surface Science

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In this paper, the shape transferability of using nanoscale multi-tip diamond tools in the diamond turning for scale-up manufacturing of nanostructures has been demonstrated. Atomistic multi-tip diamond tool models were built with different tool geometries in terms of the difference in the tip cross-sectional shape, tip angle, and the feature of tool tip configuration, to determine their effect on the applied forces and the machined nano-groove geometries. The quality of machined nanostructures was characterized by the thickness of the deformed layers and the dimensional accuracy achieved. Simulation results show that diamond turning using nanoscale multi-tip tools offers tremendously shape transferability in machining nanostructures. Both periodic and non-periodic nano-grooves with different cross-sectional shapes can be successfully fabricated using the multi-tip tools. A hypothesis of minimum designed ratio of tool tip distance to tip base width (L/Wf) of the nanoscale multi-tip diamond tool for the high precision machining of nanostructures was proposed based on the analytical study of the quality of the nanostructures fabricated using different types of the multi-tip tools. Nanometric cutting trials using nanoscale multi-tip diamond tools (different in L/Wf) fabricated by focused ion beam (FIB) were then conducted to verify the hypothesis. The investigations done in this work imply the potential of using the nanoscale multi-tip diamond tool for the deterministic fabrication of period and non-periodic nanostructures, which opens up the feasibility of using the process as a versatile manufacturing technique in nanotechnology.

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Fabrication of micro DOE using micro tools shaped with focused ion beam

Cited by 55 publications

References 9 publications

Recent advances in micro- and nano-machining technologies

Recent advances in micro- and nano-machining technologies

Investigation of a scale-up manufacturing approach for nanostructures by using a nanoscale multi-tip diamond tool

Investigation of the shape transferability of nanoscale multi-tip diamond tools in the diamond turning of nanostructures

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