Fabrication of MEMS-based capacitive silicon microphone structure with staircase contour cavity using multi-film thickness mask

Jantawong, Jirawat; Atthi, ์์Nithi; Leepattarapongpan, Chana; Srisuwan, Awirut; Jeamsaksiri, Wutthinan; Sooriakumar, K.; Austin, Anu; Niemcharoen, Surasak

doi:10.1016/j.mee.2018.12.004

Cited by 8 publications

(4 citation statements)

References 24 publications

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“…With the development of micro-electro-mechanical system (MEMS) processing technology and the decrease of manufacturing cost, capacitive pressure sensors have been widely used. Generally speaking, capacitive pressure sensors are mainly divided into single capacitor type, differential capacitance type, capacitive vacuum type, new contact type, MEMS silicon film capacitance type and other major types of pressure sensors (Jantawong et al, 2019;Arefin et al, 2017). Many flexible micro-pressure sensors adopt a capacitive structure.…”

Section: Introductionmentioning

confidence: 99%

A capacitive sensor using resin thermoplastic elastomer and carbon fibers for monitoring pressure distribution

et al. 2020

PRT

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Purpose This paper aims to study the working principle of the capacitive pressure sensor and explore the distribution of pressure acting on the surface of the capacitor. Herein, a kind of high sensitivity capacitive pressure sensor was prepared by overlaying carbon fibers (CFs) on the surfaces of the thermoplastic elastomer (TPE), the TPE with high elasticity is a dielectric elastomer for the sensor and the CFs with excellent electrical conductivity were designed as the conductor. Design/methodology/approach Due to the excellent mechanical properties and electrical conductivity of CFs, it was designed as the conductor layer for the TPE/CFs capacitive pressure sensor via laminating CFs on the surfaces of the columnar TPE. Then, a ‘#' type structure of the capacitive pressure sensor was designed and fabricated. Findings The ‘#' type of capacitive pressure sensor of TPE/CFs composite was obtained in high sensitivity with a gauge factor of 2.77. Furthermore, the change of gauge factor values of the sensor under 10 per cent of applied strains was repeated for 1,000 cycles, indicating its outstanding sensing stability. Moreover, the ‘#' type capacitive pressure sensor of TPE/CFs was consisted of several capacitor arrays via laminating CFs, which could detect the distribution of pressure. Research limitations/implications The TPE/CFs capacitive pressure sensor was easily fabricated with high sensitivity and quick responsiveness, which is desirably applied in wearable electronics, robots, medical devices, etc. Originality/value The outcome of this study will help to fabricate capacitive pressure sensors with high sensitivity and outstanding sensing stability.

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Section: Introductionmentioning

confidence: 99%

A capacitive sensor using resin thermoplastic elastomer and carbon fibers for monitoring pressure distribution

et al. 2020

PRT

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“…There are many recent examples. In one, Jantawong et al [124] introduced a stepped cavity to increase the value of the output capacitance. In another, Ganji group are pursuing the hinge or spring design to reduce the residual stress of the diaphragm [121,123].…”

Section: Future Research Direction For Mems Capacitive Microphonementioning

confidence: 99%

A Review of MEMS Capacitive Microphones

et al. 2020

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This review collates around 100 papers that developed micro-electro-mechanical system (MEMS) capacitive microphones. As far as we know, this is the first comprehensive archive from academia on this versatile device from 1989 to 2019. These works are tabulated in term of intended application, fabrication method, material, dimension, and performances. This is followed by discussions on diaphragm, backplate and chamber, and performance parameters. This review is beneficial for those who are interested with the evolutions of this acoustic sensor.

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“…heart rate * Author to whom any correspondence should be addressed. sensors, acceleration sensors, microphones, and many other devices [4][5][6]. However, elements of MEMS devices which can respond to fast-accelerations are needed in some devices.…”

Section: Introductionmentioning

confidence: 99%

Anisotropic wet etching of a novel micro-texture structure for an Al/n-Si/Al metal–semiconductor–metal photodetector fabrication

Suttijalern

Niemcharoen

2021

J. Micromech. Microeng.

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Micro-electro-mechanical system fabrication involves molding on a single substrate. Chemical wet etching is common in these systems because it can provide a very high etch rate and selectivity. This optical device has been successfully completed fabrication by using the single-step lithography process. The surface was coated with PR and patterned using a single mask to create U-shaped structures by a wide electrode gap on a silicon substrate. Then it was etched using anisotropic wet etching process in potassium hydroxide, tetramethylammonium hydroxide (TMAH), silicic acid and dissolved silicon powder. The etchant created a 58% increase in the light sensitive area of the U-shaped trench in the structure higher compared to the planar structure. Random micro-pyramids, formed on the silicon surface in the U-shaped structure by the silicic acid-added TMAH solution, led to a ∼254 times higher ratio between photon generated current and dark current at reverse bias. This processing technique is a promising technology for improving performance for next-generation optical sensors or silicon photodetector.

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Fabrication of MEMS-based capacitive silicon microphone structure with staircase contour cavity using multi-film thickness mask

Cited by 8 publications

References 24 publications

A capacitive sensor using resin thermoplastic elastomer and carbon fibers for monitoring pressure distribution

A capacitive sensor using resin thermoplastic elastomer and carbon fibers for monitoring pressure distribution

A Review of MEMS Capacitive Microphones

Anisotropic wet etching of a novel micro-texture structure for an Al/n-Si/Al metal–semiconductor–metal photodetector fabrication

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