1995
DOI: 10.1063/1.114504
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Fabrication of large arrays of metallic nanowires on V-grooved substrates

Abstract: Large arrays of Au nanowires down to 50 nm in width are fabricated on V-grooved InP substrates. Holographic laser interference exposure of photoresist and anisotropic etching are used to pattern the surface of InP(001) substrates into V-shaped grooves with a 200 nm period. Next, the patterned substrates are covered with a thin Au film, which is subsequently structured into nanowires using a well controlled wet etching process. Initial characterization confirms that the wires are electrically continuous.

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Cited by 9 publications
(6 citation statements)
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“…Nanowires are finding applications in an ever expanding list of devices. Among their capabilities, nanowires composed of metals, [1][2][3][4][5][6][7][8][11][12][13][14][15][16][17][19][20][21][22][23][31][32][33][34]39,40 semiconductors, [6][7][8][9][10]18,[24][25][26][27][28][29][41][42][43] metal oxides, 30,[44][45][46][47][48][49][50][51][52][53]…”
Section: Introductionmentioning
confidence: 99%
“…Nanowires are finding applications in an ever expanding list of devices. Among their capabilities, nanowires composed of metals, [1][2][3][4][5][6][7][8][11][12][13][14][15][16][17][19][20][21][22][23][31][32][33][34]39,40 semiconductors, [6][7][8][9][10]18,[24][25][26][27][28][29][41][42][43] metal oxides, 30,[44][45][46][47][48][49][50][51][52][53]…”
Section: Introductionmentioning
confidence: 99%
“…Au can be easily produced in nanoparticle form by the chemical [5,6] or photochemical [7,8] reduction of Au salts; however, the preparation of one-dimensional nanostructures is a challenging task, especially without using templates or surfactants [9][10][11].…”
Section: Introductionmentioning
confidence: 99%
“…Other methods have utilized different techniques to create templates for nanostructures. Jorritsma et al fabricated a large array of gold nanowires by using a V-grooved InP substrate made by holographic laser interference lithography. Au was evaporated on this substrate to form a Au-nanowire matrix.…”
Section: Introductionmentioning
confidence: 99%