Fabrication of Large-Area Three-Dimensional Microstructures on Flexible Substrates by Microtransfer Printing Methods

Huang, Chi-Chieh; Zeng, Xuefeng; Jiang, Hongrui

doi:10.1109/jmems.2012.2184085

Cited by 8 publications

(3 citation statements)

References 28 publications

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“…The omni‐directional tension provided by the cylindrical transfer stage enabled elastically reversible deformation of the hemispherical membrane into a 2‐D, planar geometry, such that conformal contact between the flattened membrane and the micro‐square‐tube array could be achieved. The Si micro‐square‐tubes were transfer‐printed to the flattened membrane by peeling the membrane away from the SOI (see Figure S2 in SI for more processing details) . Figure e and f present the reverse transformation of the elastomeric membrane relaxing back into a 3‐D, artificial RSCE from the 2‐D, planar layout.…”

Section: Resultsmentioning

confidence: 99%

Large‐Field‐of‐View Wide‐Spectrum Artificial Reflecting Superposition Compound Eyes

Huang

Liu

et al. 2014

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In nature, reflecting superposition compound eyes (RSCEs) found in shrimps, lobsters and some other decapods are extraordinary imaging systems with numerous optical features such as minimum chromatic aberration, wide-angle field of view (FOV), high sensitivity to light and superb acuity to motion. Here, we present life-sized, large-FOV, wide-spectrum artificial RSCEs as optical imaging devices inspired by the unique designs of their natural counterparts. Our devices can form real, clear images based on reflection rather than refraction, hence avoiding chromatic aberration due to dispersion by the optical materials. Compared to imaging at visible wavelengths using conventional refractive lenses of comparable size, our artificial RSCEs demonstrate minimum chromatic aberration, exceptional FOV up to 165° without distortion, modest aberrations and comparable imaging quality without any post-image processing. Together with an augmenting cruciform pattern surrounding each focused image, our large-FOV, wide-spectrum artificial RSCEs possess enhanced motion-tracking capability ideal for diverse applications in military, security, medical imaging and astronomy.

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Section: Resultsmentioning

confidence: 99%

Large‐Field‐of‐View Wide‐Spectrum Artificial Reflecting Superposition Compound Eyes

Huang

Liu

et al. 2014

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“…The detailed fabrication process flow for our bio-inspired cylindrical lens by a peeling micro-transfer printing method is illustrated in Figure 2 [18,19]. The process began with a large-scale array of 3-D, high aspect-ratio silicon (Si) micro-mirrors with highly vertical and smoothened sidewalls on a p-type, (100) silicon-on-insulator (SOI) wafer (80 μm-thick device layer and a 2 μm-thick buried oxide (BOX) layer) via contact-mode lithography, reactive ion etching (RIE) and inductively coupled plasma-based (ICP) deep reactive ion etching (DRIE), as shown in Figure 2a-d, respectively.…”

Section: Fabricationmentioning

confidence: 99%

Bio-Inspired Wide-Angle Broad-Spectrum Cylindrical Lens Based on Reflections from Micro-Mirror Array on a Cylindrical Elastomeric Membrane

Huang

Jiang

2014

Micromachines

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Abstract:We present a wide-angle, broad-spectrum cylindrical lens based on reflections from an array of three-dimensional, high-aspect-ratio micro-mirrors fabricated on a cylindrical elastomeric substrate, functionally inspired by natural reflecting superposition compound eyes. Our device can perform one-dimensional focusing and beam-shaping comparable to conventional refraction-based cylindrical lenses, while avoiding chromatic aberration. The focal length of our cylindrical lens is 1.035 mm, suitable for micro-optical systems. Moreover, it demonstrates a wide field of view of 152° without distortion, as well as modest spherical aberrations. Our work could be applied to diverse applications including laser diode collimation, barcode scanning, holography, digital projection display, microlens arrays, and optical microscopy.

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“…Namely because of the excessive duration of the release etch step, limited active materials (e.g., using harsh acid solutions for the release) and substrate wafers (e.g., required transparent for laser use), lower scale of the transfers (e.g., few mm 2 to cm 2 of patterns), the use of multiple temporary wafers, and lower reliability (e.g., 70% of patterns are transferred). [29,35] As a comparison, the transfer printing proposed in this manuscript enables successful complete transfers of 200 mm wafers.…”

Section: Introductionmentioning

confidence: 99%

Large Scale Integration of Functional Radio‐Frequency Flexible MEMS under Large Mechanical Strain

Azrak

Michaud

Reinhardt

et al. 2022

Adv Funct Materials

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A versatile industrial recipe of transferring nitride microelectronic components such as micro-electromechanical systems (MEMS) onto flexible and stretchable substrates is demonstrated. This method bypasses difficulties of temperature-related processing, and is applicable to large-scale and mass production. The technological process of fabrication is presented along with its underlying structural and radio-frequency characterizations. In particular, the Raman strain shifts of aluminum nitride (AlN) thin films are determined for uniaxial and biaxial mechanical deformations. The transferring process onto polymer is also demonstrated by an adhesive bonding of AlN-based MEMS onto a 200 mm silicon (Si) wafer. The devices microstructure is assessed using X-ray before and after transferring, as well as their electrical radio-frequency (RF) features when on Si and polymer substrates. Then, RF measurements are also performed on the transferred and flexible devices; some in their relaxed states, and others in an in situ manner under an increasing macroscopic strain. It is shown that bulk acoustic wave resonator MEMS are fully functional even under 12% uniaxial stretching of the substrate.

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Fabrication of Large-Area Three-Dimensional Microstructures on Flexible Substrates by Microtransfer Printing Methods

Cited by 8 publications

References 28 publications

Large‐Field‐of‐View Wide‐Spectrum Artificial Reflecting Superposition Compound Eyes

Large‐Field‐of‐View Wide‐Spectrum Artificial Reflecting Superposition Compound Eyes

Bio-Inspired Wide-Angle Broad-Spectrum Cylindrical Lens Based on Reflections from Micro-Mirror Array on a Cylindrical Elastomeric Membrane

Large Scale Integration of Functional Radio‐Frequency Flexible MEMS under Large Mechanical Strain

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