Fabrication of glass-based microfluidic devices with dry film photoresists as pattern transfer masks for wet etching

Zhang, Lei; Wang, Wei; Ju, Xin; Xie, Rui; Zhuang, Lei; Chu, Liang‐Yin

doi:10.1039/c4ra15907a

Cited by 53 publications

(30 citation statements)

References 52 publications

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“…Plastics are cheap, flexible, and easy to control, seemingly suitable for general purposes. However, their photolithography process is expensive and strong solvent materials cannot be used, which limits their applicability [37,38]. Silicon, on the other hand, exhibits good chemical and thermal compatibility, but it can be expensive, fragile, and opaque to visible and ultraviolet light, thus limiting its use in optical-based applications [38][39][40].…”

Section: Recent Trends In Microfluidic Device Fabricationmentioning

confidence: 99%

“…However, their photolithography process is expensive and strong solvent materials cannot be used, which limits their applicability [37,38]. Silicon, on the other hand, exhibits good chemical and thermal compatibility, but it can be expensive, fragile, and opaque to visible and ultraviolet light, thus limiting its use in optical-based applications [38][39][40]. Although optical transparency, chemical inertness, rigidity, and high temperature resistance turn glass into a good material for microfluidics, it requires slow and high-cost deposition techniques [41], making it unsuitable for mass production.…”

Section: Recent Trends In Microfluidic Device Fabricationmentioning

confidence: 99%

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Microfluidic Point-of-Care Devices: New Trends and Future Prospects for eHealth Diagnostics

Mejía‐Salazar

Cruz

Vásques

et al. 2020

Sensors

134

111

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Point-of-care (PoC) diagnostics is promising for early detection of a number of diseases, including cancer, diabetes, and cardiovascular diseases, in addition to serving for monitoring health conditions. To be efficient and cost-effective, portable PoC devices are made with microfluidic technologies, with which laboratory analysis can be made with small-volume samples. Recent years have witnessed considerable progress in this area with “epidermal electronics”, including miniaturized wearable diagnosis devices. These wearable devices allow for continuous real-time transmission of biological data to the Internet for further processing and transformation into clinical knowledge. Other approaches include bluetooth and WiFi technology for data transmission from portable (non-wearable) diagnosis devices to cellphones or computers, and then to the Internet for communication with centralized healthcare structures. There are, however, considerable challenges to be faced before PoC devices become routine in the clinical practice. For instance, the implementation of this technology requires integration of detection components with other fluid regulatory elements at the microscale, where fluid-flow properties become increasingly controlled by viscous forces rather than inertial forces. Another challenge is to develop new materials for environmentally friendly, cheap, and portable microfluidic devices. In this review paper, we first revisit the progress made in the last few years and discuss trends and strategies for the fabrication of microfluidic devices. Then, we discuss the challenges in lab-on-a-chip biosensing devices, including colorimetric sensors coupled to smartphones, plasmonic sensors, and electronic tongues. The latter ones use statistical and big data analysis for proper classification. The increasing use of big data and artificial intelligence methods is then commented upon in the context of wearable and handled biosensing platforms for the Internet of things and futuristic healthcare systems.

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Section: Recent Trends In Microfluidic Device Fabricationmentioning

confidence: 99%

Section: Recent Trends In Microfluidic Device Fabricationmentioning

confidence: 99%

Microfluidic Point-of-Care Devices: New Trends and Future Prospects for eHealth Diagnostics

Mejía‐Salazar

Cruz

Vásques

et al. 2020

Sensors

134

111

View full text Add to dashboard Cite

show abstract

“…Fabrication approaches are highly influenced by the type of material used to develop a device and the inherent properties of that material. Semiconductor materials like silicon-based devices can be fabricated using photolithography [97], which can further be used to fabricate polymeric devices using casting, injection molding [98], embossing, and imprinting techniques [99], while glass-based devices are produced by deep UV photolithography [100] and wet and dry etching methods [101]. With an increase in demand for disposable microfluidic devices in near-patient settings, cost-effective technologies, such as soft lithography, for developing polymeric micro and nano-chips have increased in the past two decades [102,103].…”

Section: Fabrication Techniquesmentioning

confidence: 99%

Microfluidics in Haemostasis: A Review

et al. 2020

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Haemostatic disorders are both complex and costly in relation to both their treatment and subsequent management. As leading causes of mortality worldwide, there is an ever-increasing drive to improve the diagnosis and prevention of haemostatic disorders. The field of microfluidic and Lab on a Chip (LOC) technologies is rapidly advancing and the important role of miniaturised diagnostics is becoming more evident in the healthcare system, with particular importance in near patient testing (NPT) and point of care (POC) settings. Microfluidic technologies present innovative solutions to diagnostic and clinical challenges which have the knock-on effect of improving health care and quality of life. In this review, both advanced microfluidic devices (R&D) and commercially available devices for the diagnosis and monitoring of haemostasis-related disorders and antithrombotic therapies, respectively, are discussed. Innovative design specifications, fabrication techniques, and modes of detection in addition to the materials used in developing micro-channels are reviewed in the context of application to the field of haemostasis.

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Section: Microfluidic Classification and Synthesis Of Colloidal Partimentioning

confidence: 99%

“…As early as the 1970s, glass or quartz tube microchannels have been used in the fields of gas chromatography and capillary electrophoresis, and these microscale analysis methods can be regarded as the prototype of microfluidics . With the development of micromachining technology in the semiconductor industry, the first generation of silicon/glass based microfluidic chips were constructed . Silicon based microfluidic devices have the advantages of resisting corrosion of organic solvent and good heat conduction.…”

Section: Microfluidic Classification and Synthesis Of Colloidal Partimentioning

confidence: 99%

Colloidal Crystals from Microfluidics

Bian

Sun

Cai

et al. 2019

Small

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Colloidal crystals are of great interest to researchers because of their excellent optical properties and broad applications in barcodes, sensors, displays, drug delivery, and other fields. Therefore, the preparation of high quality colloidal crystals in large quantities with high speed is worth investigating. After decades of development, microfluidics have been developed that provide new choices for many fields, especially for the generation of functional materials in microscale. Through the design of microfluidic chips, colloidal crystals can be prepared controllably with the advantages of fast speed and low cost. In this Review, research progress on colloidal crystals from microfluidics is discussed. After summarizing the classifications, the generation of colloidal crystals from microfluidics is discussed, including basic colloidal particles preparation, and their assembly inside or outside of microfluidic devices. Then, applications of the achieved colloidal crystals from microfluidics are illustrated. Finally, the future development and prospects of microfluidic‐based colloidal crystals are summarized.

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Fabrication of glass-based microfluidic devices with dry film photoresists as pattern transfer masks for wet etching

Abstract: A simple, cheap and rapid method is developed to fabricate glass microfluidic devices with dry film photoresist as pattern transfer masks for wet etching, which provides an efficient approach for mass-production of glass microchips.

Cited by 53 publications

References 52 publications

Microfluidic Point-of-Care Devices: New Trends and Future Prospects for eHealth Diagnostics

Microfluidic Point-of-Care Devices: New Trends and Future Prospects for eHealth Diagnostics

Microfluidics in Haemostasis: A Review

Colloidal Crystals from Microfluidics

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