Fabrication of functional nanophotonic devices by multiphoton lithography

Kuebler, Stephen M.; Xia, Chun; Sharma, Rashi; Digaum, Jennefir L.; Martinez, Noel P.; Valle, Cesar L.; Rumpf, Raymond C.

doi:10.1117/12.2508675

Cited by 3 publications

(5 citation statements)

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“…Multiphoton absorption minimizes photoinduced damage, increases penetration depths, and increases spatial resolutions [155,348,368]. Via their non-linear absorption properties, perovskite-based gain media may potentially produce an alternative path towards applications in high-capacity data storage [369,370], bioimaging [371,372], photodynamic therapy [373], and multiphoton lithography [374]. In 2015, Pan et al [155] demonstrated the first highly stable ASE based on two-photon absorption (2 PA) with surface-passivated, solution-processed CsPbBr 3 QDs.…”

Section: Multiphoton Absorption Schemementioning

confidence: 99%

Group-III-nitride and halide-perovskite semiconductor gain media for amplified spontaneous emission and lasing applications

Ng¹,

Holguín‐Lerma²,

Kang³

et al. 2021

J. Phys. D: Appl. Phys.

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Group-III-nitride optical devices are conventionally important for displays and solid-state lighting, and recently have garnered much interest in the field of visible-light communication. While visible-light laser technology has become mature, developing a range of compact, small footprint, high optical power components for the green-yellow gap wavelengths still requires material development and device design breakthroughs, as well as hybrid integration of materials to overcome the limitations of conventional approaches. The present review focuses on the development of laser and amplified spontaneous emission (ASE) devices in the visible wavelength regime using primarily group-III-nitride and halide-perovskite semiconductors, which are at disparate stages of maturity. While the former is well established in the violet-blue-green operating wavelength regime, the latter, which is capable of solution-based processing and wavelength-tunability in the green-yellow-red regime, promises easy heterogeneous integration to form a new class of hybrid semiconductor light emitters. Prospects for the use of perovskite in ASE and lasing applications are discussed in the context of facile fabrication techniques and promising wavelength-tunable light-emitting device applications, as well as the potential integration with group-III-nitride contact and distributed Bragg reflector layers, which is promising as a future research direction. The absence of lattice-matching limitations, and the presence of direct bandgaps and excellent carrier transport in halide-perovskite semiconductors, are both encouraging and thought-provoking for device researchers who seek to explore new possibilities either experimentally or theoretically. These

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Section: Multiphoton Absorption Schemementioning

confidence: 99%

Group-III-nitride and halide-perovskite semiconductor gain media for amplified spontaneous emission and lasing applications

Ng¹,

Holguín‐Lerma²,

Kang³

et al. 2021

J. Phys. D: Appl. Phys.

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“…To prepare much smaller features, the so-called two-photon polymerization technique can be used, which enables preparing structures of dimensions below the diffraction limit, partly below 100 nm [44][45][46]. For this technique, usually ultrashort laser pulses are applied.…”

Section: Two-photon and Multi-photon Polymerizationmentioning

confidence: 99%

“…The polymer material used for this 3D printing process can be, e.g., chemically modified zirconium-based sol-gel composites [44], photoinitiators with highly toxic properties or modified ones with reduced or vanishing toxicity, such as riboflavin and triethanolamine [45], and a broad range of other materials for applications in optics, photonics, electronics, or biotechnology [46]. This technique was also suggested in different patents dealing with microfluidics [47].…”

Section: Two-photon and Multi-photon Polymerizationmentioning

confidence: 99%

“…In this way, they could assemble 3D printed forms with piezoelectric chips, which were used to produce multiple resonant modes to generate bulk acoustic waves, which could again be used to manipulate suspended particles [54]. range of other materials for applications in optics, photonics, electronics, or biotechnology [46]. This technique was also suggested in different patents dealing with microfluidics [47].…”

Section: Combining 3d Printing With Other Technologiesmentioning

confidence: 99%

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3D Printed MEMS Technology—Recent Developments and Applications

Błachowicz

Ehrmann

2020

Micromachines

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Microelectromechanical systems (MEMS) are of high interest for recent electronic applications. Their applications range from medicine to measurement technology, from microfluidics to the Internet of Things (IoT). In many cases, MEMS elements serve as sensors or actuators, e.g., in recent mobile phones, but also in future autonomously driving cars. Most MEMS elements are based on silicon, which is not deformed plastically under a load, as opposed to metals. While highly sophisticated solutions were already found for diverse MEMS sensors, actuators, and other elements, MEMS fabrication is less standardized than pure microelectronics, which sometimes blocks new ideas. One of the possibilities to overcome this problem may be the 3D printing approach. While most 3D printing technologies do not offer sufficient resolution for MEMS production, and many of the common 3D printing materials cannot be used for this application, there are still niches in which the 3D printing of MEMS enables producing new structures and thus creating elements for new applications, or the faster and less expensive production of common systems. Here, we give an overview of the most recent developments and applications in 3D printing of MEMS.

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“…[ 18,19 ] As a digital technique, this process offers a rapid prototyping capability to replicate a concept, defined in a computer‐aided design (CAD) model, in real space, motivating recent applications in fields such as optics, bioengineering, and mechanical metamaterials. [ 20–24 ] Here, MPL is used to fabricate print forms with precisely tailored capillarity and deformation mechanics, achieving ink transfer with exceptional control for printed electronics applications.…”

Section: Figurementioning

confidence: 99%