Fabrication of Functional Microdevices in SU-8 by Multi-Photon Lithography

Abstract

This review surveys advances in the fabrication of functional microdevices by multi-photon lithography (MPL) using the SU-8 material system. Microdevices created by MPL in SU-8 have been key to progress in the fields of micro-fluidics, micro-electromechanical systems (MEMS), micro-robotics, and photonics. The review discusses components, properties, and processing of SU-8 within the context of MPL. Emphasis is focused on advances within the last five years, but the discussion also includes relevant developments outside this period in MPL and the processing of SU-8. Novel methods for improving resolution of MPL using SU-8 and discussed, along with methods for functionalizing structures after fabrication.

Nanostructures wetting evaluation using ultra high frequency ultrasound

“…After the definition of the micro-channel, a master mold (defining the shape and dimensions of the micro-channel) is made by direct laser lithography technique 23 , 24 using SU-8 resists (Kayaku advanced materials Inc.). The thickness of the SU-8 resist will be the same as the calculated micro-channel depth.…”

Characterization of two-photon-polymerization lithography structures via Raman spectroscopy and nanoindentation

“…For this work, the micro-and nanoindentation method was chosen because it is a more straightforward method for small structures when compared with microtensile experiments. [7][8][9][10] One reason for this is the less intensive sample preparation, whereas the design and fabrication of microtensile experiments can become complicated and time-consuming. Furthermore, the *Address all correspondence to Severin Schweiger, severin.schweiger@ipms.fraunhofer.de indentation method can be easily automated, allowing for a more reasonable timeframe for characterization.…”

Additive manufacturing of Zn with submicron resolution and its conversion into Zn/ZnO core–shell structures

“…These constraints are especially severe on the microscale, where fabrication techniques are typically optimized for planar geometries 2,3 . Overcoming these constraints of classical microfabrication has applications in manufacturing intricate structures, for example in microelectromechanical systems (MEMS) 4 , photonics 5 or microrobotics 6 . Thus, significant effort is currently made to develop AM techniques with resolutions in the submicron range [7][8][9][10][11] .…”