Characterization of two-photon-polymerization lithography structures via Raman spectroscopy and nanoindentation

Schweiger, Severin; Schulze, Tim; Schlipf, S.; Reinig, Peter; Schenk, Harald

doi:10.1117/1.jom.2.3.033501

Cited by 12 publications

(12 citation statements)

References 24 publications

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“…[63,357] Generally, the structures are deformed due to temperature changes, optical irradiation, or post-processing methods. The primary reason for the shrinkage and deformation in the fabricated structures is due to the low degree of conversion (DC) of resin, [66,132,[358][359][360] and nonuniformity of RI is caused by the inhomogeneous DC values in the volume. For typical TPL resins, differential scanning calorimetry (DSC), coherent anti-Stokes Raman scattering (CARS) spectroscopy, Raman microspectroscopy, and Fourier transform infrared (FTIR) spectroscopy etc.…”

Section: High-quality Fabrication From Voxel To Bulkmentioning

confidence: 99%

“…[131] Moreover, due to their specialized properties, fabrication of accurate optical structures with low roughness and 3D-sctructures with high aspect ratios and low shrinkage, were enabled with favorable mechanical stability. [132] In addition, these photosensitive materials are capable of bio-photonic applications as they show biocompatibility and low autofluorescence. More applications of these materials have been investigated such as micro-optics, [133,134] , microfluidics, [135] diffractive optical elements (DOEs), [136] microelectromechanical systems (MEMS), [137] and medical sciences.…”

Section: Acrylatesmentioning

confidence: 99%

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Two‐Photon Polymerization Lithography for Optics and Photonics: Fundamentals, Materials, Technologies, and Applications

Wang

Zhang

Ladika

et al. 2023

Adv Funct Materials

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The rapid development of additive manufacturing has fueled a revolution in various research fields and industrial applications. Among the myriad of advanced three-dimensional printing techniques, two-photon polymerization lithography (TPL) uniquely offers a significant electron microscope (SEM) images of SMP structures before and after programming and after recovery, respectively. Reproduced under terms of the CC-BY license. [114] Copyright 2021, The Authors, published by Nature Publishing Group. b) Stiff SMPs for high-resolution reversible nanophotonics. I-II) The deformed and recovered nanopillars under optical microscope and SEM, respectively. Reproduced with permission. [115] Copyright 2022, American Chemical Society. c) Vapor-responsive photonic arrays. I-IV) Optical image of a grid array in air, in water vapors ~ 20 s, saturation with water vapors ~ 88s, and after the gas flow stopped, respectively.Reproduced under terms of the CC-BY license. [116] Copyright 2021, The Authors, published by Royal Society of Chemistry. d) SEM image of a 40-layer face-cantered-cubic photonic structure printed by SU-8. Reproduced with permission. [117] Copyright 2004, Nature Publishing Group. e) SEM image of helices with an axial pitch of 800 nm and a radius of 800 nm fabricated by the two-step absorption photoresist. Reproduced with permission. [118]

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Section: High-quality Fabrication From Voxel To Bulkmentioning

confidence: 99%

Section: Acrylatesmentioning

confidence: 99%

Two‐Photon Polymerization Lithography for Optics and Photonics: Fundamentals, Materials, Technologies, and Applications

Wang

Zhang

Ladika

et al. 2023

Adv Funct Materials

View full text Add to dashboard Cite

show abstract

“…Print parameters, including laser power, needed to be slightly adjusted to return to a high yield process. Extensive quantification of 2PP and Nanoscribe parameter effects are available in the literature [54,55] and outside the scope of this paper.…”

Section: Fabrication Of Spider-inspired Hydraulic Microactuatorsmentioning

confidence: 99%

Spider‐Inspired, Fully 3D‐Printed Micro‐Hydraulics for Tiny, Soft Robotics

Smith

Tyler

Lazarus

et al. 2023

Adv Funct Materials

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Many arachnids use internal hemolymph pressure to actuate extension in their leg joints. The inherent large foot displacement‐to‐body length ratio that arachnids can achieve through hydraulics relative to muscle‐based actuators is both energy and volumetrically efficient. Until recent advances in nano/microscale 3D printing with two‐photon polymerization (2PP), the physical realization of synthetic complex ‘soft’ joints would have been impossible to replicate and fill with a hydraulic fluid into a sealed sub‐millimeter system. Inspired by nature, the smallest scale 3D‐printed hydraulic actuator (4.9 × 10−4 mm3) by more than an order of magnitude is demonstrated. The use of stiff 2PP polymers with micron‐scale dimensions enable compliant membranes similar to exoskeletons seen in nature without the requirement for low‐modulus materials. The bio‐inspired system is designed to mimic similar hydraulic pressure‐activated mechanisms in arachnid joints utilized for large displacement motions relative to body length. Using variations on this actuator design, the ability to transmit forces with relatively large magnitudes (milliNewtons) in 3D space is demonstrated, as well as the ability to direct motion that is useful towards microrobotics and medical applications. Microscale hydraulic actuation provides a promising approach toward the transmission of large forces and 3D motions at small scales, previously unattainable in wafer‐level 2D microelecromechanical systems (MEMS).

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“…Nevertheless, this approach is and must be the basis of the digitally controlled guidance of the laser focus. Different studies on slicing approaches regarding the fs-LDW technique have been conducted [25][26][27]. Bauer et al [28] investigated the relationship between laser velocity, laser power and hatch/slice distance and found a mechanical enhancing effect at higher overlaps.…”

Section: Introductionmentioning

confidence: 99%

First of its kind: a test artifact for direct laser writing

Fritzsche

Weimann

Pauw

et al. 2023

Meas. Sci. Technol.

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With Direct Laser Writing (DLW) maturing in all aspects as a manufacturing technology a toolset for quality assurance must be developed.In this work we want to introduce a first of its kind test artifact. Test artifacts are standardized 3D models with specific geometric feature to evaluate the performance of writing parameters.Test artifacts are already common in other 3D additive manufacturing technologies e.g. Selective Laser Melting. The test artifact introduced in this work was developed in particular to accommodate 1) the high geometrical resolution of DLW structures and 2) the limited possibilities to examine the resulting structure.Geometric accuracy, surface adhesion as well as confocal raman spectroscopy results were considered when evaluating the design of the test artifact.We will explain the individual features and design considerations of our DLW test artifact. The difference between two slicers, Cura and 3DPoli, and the implications on measured feature sizes and the general shape is quantified. The measured geometries are used to derive a general design guide for a specific combination of photoresist, laser power and scanning speed and to analyse the geometric accuracy of a structure produced using these guidelines.

show abstract

Characterization of two-photon-polymerization lithography structures via Raman spectroscopy and nanoindentation

Cited by 12 publications

References 24 publications

Two‐Photon Polymerization Lithography for Optics and Photonics: Fundamentals, Materials, Technologies, and Applications

Two‐Photon Polymerization Lithography for Optics and Photonics: Fundamentals, Materials, Technologies, and Applications

Spider‐Inspired, Fully 3D‐Printed Micro‐Hydraulics for Tiny, Soft Robotics

First of its kind: a test artifact for direct laser writing

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