Fabrication of Freestanding Metallic Ni-Mo-W Microcantilever Beams With High Dimensional Stability

Valentino, Gianna M.; Shetty, Pralav P.; Krogstad, Jessica A.; Hemker, Kevin J.

doi:10.1109/jmems.2019.2958862

Cited by 6 publications

(2 citation statements)

References 39 publications

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“…Followup studies attempted to verify the potential of Ni-Mo-W thin film as a structural material by preparing the sample at a much lower deposition rate, 29,30 measuring the thermal expansion coefficient 31 and electrical resistance, 32 assessing the thermal stability with an in situ transmission electron microscopy (TEM) study, 33 and fabricating micro-cantilever beams. 34 For a complete reliability evaluation, the fatigue resistance of Ni-Mo-W thin films must be understood. Repeated cyclic loading is responsible for more than half of the structural failures for components in service.…”

Section: Introductionmentioning

confidence: 99%

“…Follow-up studies attempted to verify the potential of Ni–Mo–W thin film as a structural material by preparing the sample at a much lower deposition rate, 29,30 measuring the thermal expansion coefficient 31 and electrical resistance, 32 assessing the thermal stability with an in situ transmission electron microscopy (TEM) study, 33 and fabricating micro-cantilever beams. 34…”

Section: Introductionmentioning

confidence: 99%

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