Fabrication of force sensitive penetrating electrical neuroprobe arrays

Morita, Shogo; Fujishiro, Akifumi; Ikedo, A.; Ishida, M.; Kawano, Takeshi

doi:10.1109/memsys.2012.6170136

Cited by 4 publications

(1 citation statement)

References 10 publications

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“…However, microprobes with more than 500 µm lengths were unable to penetrate tissues due to the buckling of the probe [6,7]. The buckling load of the silicon probe with a column shape can be depicted as,…”

Section: Introductionmentioning

confidence: 99%

Verification of bending strength of vapor-liquid-solid grown high-aspect-ratio silicon-neuroprobes

Imashioya

Yagi

et al. 2013

2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS)

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MEMS-based penetrating probe electrode devices have opened a new class of multi-site electrophysiological recordings of neurons/cells in a tissue with a high spatial resolution. Although these probes becomes a powerful tool in electrophysiology, the challenge still remains the tissue penetrations with small diameter probes for further low-invasive and safe tissue penetrations. However, it is difficult to penetrate small diameter probes with a high aspect ratio (e.g., a micro-scale diameter probe with the length of several hundred microns or more), due to the buckling of the probe during the tissue penetration (Fig.1). To realize the tissue penetration with small diameter needle with a high aspect ratio, quantitative discussions of the penetration force and the buckling/bending properties of the probe are further required. Here we verify the bending strength of silicon-microprobe with a high aspect ratio using in situ force-measurement-system (FMS) inside the SEM. In addition, these silicon probes are coated with a metal of iridium (Ir) with a high Young's modulus as the exoskeleton (shell), quantitatively confirming the increased stiffness of the probe. Such data can be used to design stiff probes and realize the minimization of the probe diameter, enhancing the penetrating capability of small probes for further low-invasive and safe tissue penetrations.

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Section: Introductionmentioning

confidence: 99%

Verification of bending strength of vapor-liquid-solid grown high-aspect-ratio silicon-neuroprobes

Imashioya

Yagi

et al. 2013

2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS)

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Dissolvable material for high-aspect-ratio flexible silicon-microwire penetrations

Yagi

Yamagiwa

Imashioya

et al. 2014

2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)

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Evaluation of silicon fracture strength dependence on stealth dicing layers for “cleave-before-use” MEMS freestanding cantilever probes

Kubota

Hosaka

Sugiyama

et al. 2013

2013 Transducers &Amp; Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems

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Fabrication of force sensitive penetrating electrical neuroprobe arrays

Cited by 4 publications

References 10 publications

Verification of bending strength of vapor-liquid-solid grown high-aspect-ratio silicon-neuroprobes

Verification of bending strength of vapor-liquid-solid grown high-aspect-ratio silicon-neuroprobes

Dissolvable material for high-aspect-ratio flexible silicon-microwire penetrations

Evaluation of silicon fracture strength dependence on stealth dicing layers for “cleave-before-use” MEMS freestanding cantilever probes

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Fabrication of force sensitive penetrating electrical neuroprobe arrays

Cited by 4 publications

References 10 publications

Verification of bending strength of vapor-liquid-solid grown high-aspect-ratio silicon-neuroprobes

Verification of bending strength of vapor-liquid-solid grown high-aspect-ratio silicon-neuroprobes

Dissolvable material for high-aspect-ratio flexible silicon-microwire penetrations

Evaluation of silicon fracture strength dependence on stealth dicing layers for &#x201C;cleave-before-use&#x201D; MEMS freestanding cantilever probes

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Evaluation of silicon fracture strength dependence on stealth dicing layers for “cleave-before-use” MEMS freestanding cantilever probes