2013 Transducers &Amp; Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems 2013
DOI: 10.1109/transducers.2013.6626724
|View full text |Cite
|
Sign up to set email alerts
|

Evaluation of silicon fracture strength dependence on stealth dicing layers for “cleave-before-use” MEMS freestanding cantilever probes

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...

Citation Types

0
0
0

Year Published

2016
2016
2016
2016

Publication Types

Select...
1

Relationship

0
1

Authors

Journals

citations
Cited by 1 publication
references
References 6 publications
0
0
0
Order By: Relevance