Fabrication of dual-focus dual-layered microlens

Lee, Jong-Moo; Lee, Dong‐Hyo; Baek, Yongsoon

doi:10.1016/j.optcom.2012.09.076

Cited by 16 publications

(3 citation statements)

References 17 publications

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“…With a few exceptions, for which it is desirable that the resist is etched simultaneously with the functional material (e.g., for the transfer of three‐dimensional structures by proportional etching), the resist should ideally remain unaffected during the entire plasma etching process so that the dimensional control of the structures is not compromised. High selectivity of the resist towards the functional material during etching process is desirable also in applications in which high‐aspect‐ratio structures need to be achieved.…”

Section: Methodsmentioning

confidence: 99%

Novel Hybrid Organic–Inorganic Spin‐on Resist for Electron‐ or Photon‐Based Nanolithography with Outstanding Resistance to Dry Etching

Zanchetta

Giustina

Grenci³

et al. 2013

Advanced Materials

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A new spin-on alumina-based resist exhibits excellent performance in terms of both achievable lateral resolution and etch resistance in fluorine-based non-cryo-cooled dry etching processes. The resist has selectivity greater than 100:1 with respect to the underlying silicon during the etching process, patternability with various lithographic tools (UV, X-rays, electron beam, and nanoimprint lithography), and positive and negative tone behavior depending only on the developer chemistry.

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Section: Methodsmentioning

confidence: 99%

Novel Hybrid Organic–Inorganic Spin‐on Resist for Electron‐ or Photon‐Based Nanolithography with Outstanding Resistance to Dry Etching

Zanchetta

Giustina

Grenci³

et al. 2013

Advanced Materials

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“…A microlens with two aspheric surfaces was fabricated to achieve a diffraction-limited focus spot for high-density optical storage systems [4]. Particularly, a special kind of microlenses with lens-on-lens structures has attracted remarkable attention because of its extraordinary beam reshaping abilities as well as the promising applications in diverse optical systems, such as optical storage and unconfined fluctuating target counting systems [5][6][7][8][9][10].…”

Section: Introductionmentioning

confidence: 99%

Rapid optical μ-printing of polymer top-lensed microlens array

Ouyang¹,

Yin²,

Wu³

et al. 2019

Opt. Express

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Microlenses have wide applications for light beam focusing or shaping in microoptical systems. However, it remains challenging for conventional microfabrication methods to rapidly fabricate arrays of microlenses with complex profiles like lens-on-lens structures. In this paper, we present the rapid fabrication of polymer microlenses with lens-on-lens structures by using a digital optical μ-printing technology. An improved dynamic optical exposure method is developed to directly and precisely fabricate polymer top-lensed microlenses (TLMLs). Arrays of TLMLs with either elongated focal depth or two separate foci have been numerically investigated and experimentally demonstrated.

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“…Three typical examples of them are birefringent lenses [2,3], two-layered spherical lenses [10] and liquid lenses with stepped-thickness membranes [11]. Taking advantage of the refractive index deviation for rays with different polarizations (namely ordinary rays and extraordinary rays), various uniaxial crystals can be used to make DF lenses.…”

Section: Introductionmentioning

confidence: 99%

Miniature electrically tunable rotary dual-focus lenses

et al. 2016

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The emerging dual-focus lenses are drawing increasing attention recently due to their wide applications in both academia and industries, including laser cutting systems, microscopy systems, and interferometer-based surface profilers. In this paper, a miniature electrically tunable rotary dual-focus lens is developed. Such a lens consists of two optical elements, each having an optical flat surface and one freeform surface. The two freeform surfaces are initialized with the governing equation Ar 2 θ (A is the constant to be determined, r and θ denote the radii and angles in the polar coordinate system) and then optimized by ray tracing technique with additional Zernike polynomial terms for aberration correction. The freeform surfaces are achieved by a single-point diamond turning technique and then a PDMS-based replication process is utilized to materialize the final lens elements. To drive the two coaxial elements to rotate independently, two MEMS thermal rotary actuators are developed and fabricated by a standard MUMPs process. The experimental results show that the MEMS thermal actuator provides a maximum rotation angle of about 8.2 degrees with an input DC voltage of 6.5 V, leading to a wide tuning range for both the two focal lengths of the lens. Specifically, one focal length can be tuned from about 30 mm to 20 mm while the other one can be adjusted from about 30 mm to 60 mm.

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Fabrication of dual-focus dual-layered microlens

Cited by 16 publications

References 17 publications

Novel Hybrid Organic–Inorganic Spin‐on Resist for Electron‐ or Photon‐Based Nanolithography with Outstanding Resistance to Dry Etching

Novel Hybrid Organic–Inorganic Spin‐on Resist for Electron‐ or Photon‐Based Nanolithography with Outstanding Resistance to Dry Etching

Rapid optical μ-printing of polymer top-lensed microlens array

Miniature electrically tunable rotary dual-focus lenses

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