Rapid optical μ-printing of polymer top-lensed microlens array

Ouyang, Xia; Yin, Zhengkun; Wu, Jushuai; Zhou, Changhe; Zhang, A. Ping

doi:10.1364/oe.27.018376

Cited by 8 publications

(5 citation statements)

References 25 publications

(30 reference statements)

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“…The designed patterns of waveguides were converted into 8-bit grayscale bitmaps and uploaded to DMD, which acts as a virtual mask for use in optical exposure process. With the assumption that a gray value g can be approximately represented by the depth of light penetration in SU-8 in the fabrication, the total exposure time t can be determined in line accordance with the Beer Lambert law [27] as:…”

Section: A Experimental Setup and Fabrication Processesmentioning

confidence: 99%

Fabrication of Polymer Optical Waveguides by Digital Ultraviolet Lithography

Ding

Wang

et al. 2022

J. Lightwave Technol.

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We present the design, fabrication and characterization of polymer optical waveguides using a digital ultraviolet (UV) lithography. Grayscale optical exposure with a nonlinear compensation in quadratic form is applied to minimize the stitching loss of the transition zone between two adjacent subpatterns. Proximity effects in lithography process are compensated based on an exposure dose-map that is calculated under the approximation of scattered light pixel with a Gaussian distribution. The bending loss and propagation loss of the fabricated polymer waveguides are experimentally characterized to be around 0.1 dB/90°-bend and 0.238 dB/mm, respectively. Moreover, 1  2 multimode-interference power splitter, 1  2 Y-branch power splitter and microring resonator are demonstrated to show the feasibility of the lithography technology on rapid fabrication of waveguides. Such a UV lithography technology flexibly manipulates huge-number light pixels for all-digital grayscale and dynamic optical exposure and thus can enable the fabrication of novel optical waveguide-based devices and sensors, such as 2.5D waveguides for multimode crossing and polymer waveguide devices for biosensing.

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Section: A Experimental Setup and Fabrication Processesmentioning

confidence: 99%

Fabrication of Polymer Optical Waveguides by Digital Ultraviolet Lithography

Ding

Wang

et al. 2022

J. Lightwave Technol.

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“…Additionally, traditional fabrication methods have drawbacks, such as limitations in miniaturizing the size, restrictions in designing the geometry, etc. In the photonics domain, additive manufacturing was recently demonstrated as a potential method for the fabrication of high-performance micro-optical components. − Among such methods, the two-photon 3D printing technique holds great promise for realizing truly 3D photonic components. − The quality of devices fabricated by two-photon direct laser writing is often dictated by the quality of the lens system. Generally, a high-quality free-space objective lens with a high numerical aperture (NA) is used for high-resolution two-photon writing, which potentially increases the cost and causes possible alignment problems.…”

Section: Introductionmentioning

confidence: 99%

Inverse Design and 3D Printing of a Metalens on an Optical Fiber Tip for Direct Laser Lithography

et al. 2021

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An inverse-designed metalens is proposed, designed, and fabricated on an optical fiber tip via a 3D direct laser-writing technique through two-photon polymerization. A computational inverse-design method based on an objective-first algorithm was used to design a thin circular grating-like structure to transform the parallel wavefront into a spherical wavefront at the near-infrared range. With a focal length about 8 μm at an operating wavelength of 980 nm and an optimized focal spot at the scale of 100 nm, our proposed metalens platform is suitable for two-photon direct laser lithography. We demonstrate the use of the fabricated metalens in a direct laser lithography system. The proposed platform, which combines the 3D printing technique and the computational inverse-design method, shows great promise for the fabrication and integration of multiscale and multiple photonic devices with complex functionalities.

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“…1, for the ultrasensitive detection of biomarkers. With an in-house, digital mirror device (DMD)-based optical 3D µ-printing technology, 28 we develop an improved process technology to rapidly print polymer WGM microcavities of suspended microdisks with finer profiles and a relatively high quality factor (Q-factor). After deposition of a thin layer of optical gain materials, very lowthreshold WGM microlasers, whose laser oscillation can operate at the pump pulse energy of 25.06 nJ/mm 2 , were fabricated.…”

Section: Introductionmentioning

confidence: 99%