Fabrication of cosputtered Zn–In–Sn–O films and their applications to organic light-emitting diodes

Heo, Gi Seok; Matsumoto, Yuji; Gim, In Gi; Park, Jong Woon; Kim, Kwang Young; Kim, Tae Won

doi:10.1016/j.ssc.2009.07.050

Cited by 24 publications

(19 citation statements)

References 15 publications

Supporting

Mentioning

Contrasting

Unclassified

Order By: Relevance

“…Optical transmission analysis of the samples revealed an average transparency of more than 80 % in the visible range (400-750 nm) for samples containing Zinc (Figure 4), which is in agreement with previously published results [21,26]. Besides, the ITO sample deposited with the same conditions (without any additional oxygen during sputtering) showed a lower transmittance of 74 % in the same range.…”

supporting

confidence: 91%

“…The improvement in the resistivity observed for low Zn addition (sample ZITO25) is similar to that reported by Minami et al [35], Liu et al [26] and Heo et al [21]. The exact Zn concentration values that lead to a minimum in the resistivity are different, and also the deposition conditions vary among these authors.…”

supporting

confidence: 86%

“…Similar XRD spectra has been reported earlier for ZITO samples deposited by co-sputtering [21,22]. This could be easily understood on the fact that, during the low temperature sputter deposition (in this case no intentional heating was applied); species reached the unheated substrate and did not receive extra energy to enhance the formation of polycrystalline layers.…”

supporting

confidence: 83%

See 2 more Smart Citations

Electrical and optical properties of Zn–In–Sn–O transparent conducting thin films

et al. 2011

View full text Add to dashboard Cite

Abstract:Indium tin oxide (ITO) is one of the widely used transparent conductive oxides (TCO) for application as transparent electrode in thin film silicon solar cells or thin film transistors owing to its low resistivity and high transparency. Nevertheless, indium is a scarce and expensive element and ITO films require high deposition temperature to achieve good electrical and optical properties. On the other hand, although not competing as ITO, doped Zinc Oxide (ZnO) is a promising and cheaper alternative. Therefore, our strategy has been to deposit ITO and ZnO multicomponent thin films at room temperature by radiofrequency (RF) magnetron cosputtering in order to achieve TCOs with reduced indium content. Thin films of the quaternary system Zn-In-Sn-O (ZITO) with improved electrical and optical properties have been achieved. *Manuscript Click here to view linked ReferencesThe samples were deposited by applying different RF powers to ZnO target while keeping a constant RF power to ITO target. This led to ZITO films with zinc content ratio varying between 0 and 67 %. The optical, electrical and morphological properties have been thoroughly studied.The film composition was analysed by X-ray Photoelectron Spectroscopy. The films with 17 % zinc content ratio showed the lowest resistivity (6.6×10 -4 Ωcm) and the highest transmittance (above 80 % in the visible range). Though X-ray Diffraction studies showed amorphous nature for the films, using High Resolution Transmission Electron Microscopy we found that the microstructure of the films consisted of nanometric crystals embedded in a compact amorphous matrix. The effect of post deposition annealing on the films in both reducing and oxidizing atmospheres were studied. The changes were found to strongly depend on the zinc content ratio in the films.

show abstract

supporting

confidence: 91%

supporting

confidence: 86%

supporting

confidence: 83%

See 1 more Smart Citation

Electrical and optical properties of Zn–In–Sn–O transparent conducting thin films

et al. 2011

View full text Add to dashboard Cite

show abstract

“…Minami [7] used low-resistivity ZnO-In 2 O 3 thin film to substitute for indium tin oxide (ITO) transparent electrode. Heo et al [8] not only grew the Zn-In-Sn-O film (not co-sputtering method) at the substrate temperature of 250 • C, but also applied in the organic light-emitting diodes (OLEDs). The Zn-In-Sn-O film was further used as a transparent anode in fabrication of the flexible OLEDs [9].…”

Section: Introductionmentioning

confidence: 99%

A study on crystallization, optical and electrical properties of the advanced ZITO thin films using co-sputtering system

Chen

Hung

Chang

et al. 2011

Journal of Alloys and Compounds

View full text Add to dashboard Cite

“…3) Among these structures, ZnO-In 2 O 3 -SnO 2 (ZITO) film has received extensive attention because of its potential applications in various optoelectronic devices. 4,5) To obtain a good performance of the optoelectronic devices, high quality transparent conductive oxide (TCO) film play a decisive role. [6][7][8][9] Therefore, various annealed treatments were used to achieve a better quality of TCO films.…”

Section: Introductionmentioning

confidence: 99%

The Bias-Crystallization Mechanism on Structural Characteristics and Electrical Properties of Zn-In-Sn-O Film

et al. 2011

View full text Add to dashboard Cite

The Zn-In-Sn-O (ZITO) transparent conductive oxide (TCO) films were deposited onto indium/glass substrate by co-sputtering system. The bias-crystallization mechanism (BCM) was used to promote the quality of ZITO films. After biasing treatment (biased at 4 V for 20 min), the resistivity of ZITO film reduced from 3:08 Â 10 À4 Ãcm to 6:3 Â 10 À5 Ãcm. This reduction was attributed to the indium ions diffused into ZITO film using BCM. According to the Joule's law and Ohm's law, the required energy of biasing treatment was only 480 Joule. Comparing with traditional annealed treatment (annealing at 500 C for 20 min in vacuum required 9:8 Â 10 6 Joule), BCM had improved the conductivity of ZITO film in a short time at room temperature and possessed an excellent competitiveness of cost.

show abstract

Fabrication of cosputtered Zn–In–Sn–O films and their applications to organic light-emitting diodes

Cited by 24 publications

References 15 publications

Electrical and optical properties of Zn–In–Sn–O transparent conducting thin films

Electrical and optical properties of Zn–In–Sn–O transparent conducting thin films

A study on crystallization, optical and electrical properties of the advanced ZITO thin films using co-sputtering system

The Bias-Crystallization Mechanism on Structural Characteristics and Electrical Properties of Zn-In-Sn-O Film

Contact Info

Product

Resources

About