2023
DOI: 10.1021/acsanm.3c00190
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Fabrication of Chiral Nanostructures through Vibration-Assisted Scratching Combined with Wet Etching for Surface-Enhanced Raman Scattering Substrates

Abstract: A fabrication technique is proposed based on tip-based ultrasonic vibration-assisted scratching (UVAS) combined with wet chemical etching. UVAS induced a deeper subsurface damage of the machined nanostructure than the conventional scratching (CS), obtaining a high depth-to-width ratio nanostructure after hydrofluoric acid etching. Furthermore, the tip wear for UVAS was lesser than that for CS owing to the small friction of UVAS. Furthermore, periodic nanograting structures, nanodot arrays, and chiral nanostruc… Show more

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Cited by 1 publication
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“…However, this method faces deformation problems due to unbalanced pressure and swelling in organic solvent [23]. The second method is to transfer the hydrophobic surface to hydrophilic through chemical etching, [24] radio-frequency (RF) plasma discharge, [25] and UV irradiation [26,27]. The first two methods require a patterned shadow mask to generate heterogeneous wettability patterns.…”
Section: Introductionmentioning
confidence: 99%
“…However, this method faces deformation problems due to unbalanced pressure and swelling in organic solvent [23]. The second method is to transfer the hydrophobic surface to hydrophilic through chemical etching, [24] radio-frequency (RF) plasma discharge, [25] and UV irradiation [26,27]. The first two methods require a patterned shadow mask to generate heterogeneous wettability patterns.…”
Section: Introductionmentioning
confidence: 99%