Fabrication of carbon nanotube-based nanodevices using a combination technique of focused ion beam and plasma-enhanced chemical vapor deposition

Abstract

This study focuses on the fabrication of two nanodevice prototypes which utilized vertical and horizontal carbon nanotubes used the focused ion beam to localize the catalysts, followed by plasma-enhanced chemical vapor deposition. First, metal-gated carbon nanotube field emitter arrays were fabricated on multilayer substrates containing an imbedded catalyst layer. Second, horizontally aligned single-walled carbon nanotubes were grown on a transmission electron microscopy grid. This allows the carbon nanotubes to be directly analyzed in a transmission electron microscope. It is expected that the methodology introduced here will open up opportunities for the direct fabrication of carbon nanotube based nanodevices.

An Overview of the Recent Progress in the Synthesis and Applications of Carbon Nanotubes

“…By the neighboring CNTs, a high-density array of CNTs in electric field screening therefore reduces the emission current, whereas poor emission from a low density of CNTs is due to the smaller number of emission sites availability. Catalyst patterning has achieved selected area low-density growth of CNTs, using nanosphere lithography (NSL) [217] electron beam lithography [218], photolithography [219], focused ion beam lithography [220], and chemical etching [221]. Dionne et al have investigated individual as well as arrays of CNTs field enhancement factors [222].…”

Study of temperature rise during focused Ga ion beam irradiation using nanothermo-probe

“…The focused ion beam technology has emerged as one of the most powerful and indispensable tool for the fabrication of prototype micro/nanostructures [10][11][12][13][14][15] which is a new addition in the nanofabrication techniques. It involves two basic phenomena namely sputtering and molecular cracking, leading to the material removal and material deposition, respectively [16].…”

Effect of ion irradiation on the properties of carbon nanotube buckypapers

“…Remarkable electrical, optical and mechanical properties of individual carbon nanotubes (CNTs) indicate that CNTs can be used in various nano devices and nano materials [1]. Nevertheless, it is still difficult for the macroscopic CNT samples to preserve as many of the unique properties of individual CNTs as possible.…”