Fabrication of .BETA.-FeSi2 Thin Films by PLD Method and Improvement of Film-quality by Laser Annealing Process Using a Nd :YAG Laser

Suzuki, Akio; Yasui, Mitsuhiro; Aoki, Takanori; Matsushita, Teruo; Okuda, Masahiro; Mitsuzuka, Kazuhiro

doi:10.3131/jvsj.47.224

SHINKU

2004

DOI: 10.3131/jvsj.47.224

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Fabrication of .BETA.-FeSi2 Thin Films by PLD Method and Improvement of Film-quality by Laser Annealing Process Using a Nd :YAG Laser

Akio Suzuki

Mitsuhiro Yasui

Takanori Aoki

et al.

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Fabrication of .BETA.-FeSi2 Thin Films by PLD Method and Improvement of Film-quality by Laser Annealing Process Using a Nd :YAG Laser

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