2012 IEEE International Ultrasonics Symposium 2012
DOI: 10.1109/ultsym.2012.0460
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Fabrication of arbitrary curvature focused PZT thin film ultrasonic transducer with tunable acoustic impedance based on micropatterned flexible substrate

Abstract: This paper presents a novel micro-fabrication of acoustic impedance matching layer on a high-frequency focused piezoelectric ultrasonic transducer. The proposed fabrication method allows the acoustic impedance of the matching layer designable, so better acoustic energy transmission and operating bandwidth can be achieved. A micromachining technique is used to make micro-cavities on a flexible metal sheet. The patterned sheet forms a designed curvature with proper shaping and lead titanium zirconium (PZT) slurr… Show more

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“…To achieve these design requirements, a metal sheet has been used as the substrate for PZT film deposition [ 10 , 11 ]. This substrate is then micromachined to form periodic microcavities for the subsequent fabrication of the acoustic impedance gradient matching layer.…”
Section: Consideration Of Device Design and Fabrication Processmentioning
confidence: 99%
“…To achieve these design requirements, a metal sheet has been used as the substrate for PZT film deposition [ 10 , 11 ]. This substrate is then micromachined to form periodic microcavities for the subsequent fabrication of the acoustic impedance gradient matching layer.…”
Section: Consideration Of Device Design and Fabrication Processmentioning
confidence: 99%